Substrate processing apparatus and substrate processing method
US-12564868-B2 · Mar 3, 2026 · US
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Inatomi Yuichiro patents
Inatomi Yuichiro is listed as an inventor on 54 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Inatomi Yuichiro |
| Total patents | 54 |
| First publication | Jan 29, 2015 |
| Latest publication | Mar 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus and substrate processing method
US-12404587-B2 · Sep 2, 2025 · US
Substrate processing method, plasma processing apparatus, and substrate processing system
US-2025273621-A1 · Aug 28, 2025 · US
Substrate liquid processing apparatus for supplying temperature-controlled plating liquid
US-12281390-B2 · Apr 22, 2025 · US
Plating method and plating apparatus
US-2024309511-A1 · Sep 19, 2024 · US
Substrate processing apparatus and substrate processing method
US-2024066561-A1 · Feb 29, 2024 · US
Substrate liquid processing apparatus, substrate liquid processing method and recording medium
US-11795546-B2 · Oct 24, 2023 · US
Substrate processing apparatus and substrate processing method
US-2023098105-A1 · Mar 30, 2023 · US
Substrate liquid processing method and substrate liquid processing apparatus
US-2022406605-A1 · Dec 22, 2022 · US
Plating method and recording medium
US-11519074-B2 · Dec 6, 2022 · US
Recent patents
Latest publications not already listed above.
Substrate liquid processing method, substrate liquid processing apparatus, and computer-readable recording medium
US-2022290302-A1 · Sep 15, 2022 · US
Substrate liquid processing apparatus and substrate liquid processing method
US-2022074052-A1 · Mar 10, 2022 · US
Plating method, plating apparatus and recording medium
US-11230767-B2 · Jan 25, 2022 · US
Substrate liquid processing apparatus and substrate liquid processing method
US-2021317581-A1 · Oct 14, 2021 · US
Plating method, plating apparatus and recording medium
US-11028483-B2 · Jun 8, 2021 · US
Forming method of hard mask
US-11004684-B2 · May 11, 2021 · US
Plating method, plating apparatus and recording medium
US-2021115565-A1 · Apr 22, 2021 · US
Substrate liquid processing apparatus, substrate liquid processing method and recording medium
US-2021002770-A1 · Jan 7, 2021 · US
Plating method and recording medium
US-2020325581-A1 · Oct 15, 2020 · US
Plating method, plating apparatus and recording medium
US-10784111-B2 · Sep 22, 2020 · US
Plating apparatus, plating method, and recording medium
US-10731256-B2 · Aug 4, 2020 · US
Plating method, plating apparatus and recording medium
US-2019271084-A1 · Sep 5, 2019 · US
Plating method, plating apparatus and recording medium
US-2019267242-A1 · Aug 29, 2019 · US
Plating method, plating apparatus and recording medium
US-2019256980-A1 · Aug 22, 2019 · US
Adhesion layer forming method, adhesion layer forming system and recording medium
US-10354915-B2 · Jul 16, 2019 · US
Forming method of hard mask
US-2019157083-A1 · May 23, 2019 · US
Forming method of hard mask, forming apparatus of hard mask and recording medium
US-10224202-B2 · Mar 5, 2019 · US
Plating method, plated component, and plating system
US-10179950-B2 · Jan 15, 2019 · US
Plating method, plating system and storage medium
US-10030308-B2 · Jul 24, 2018 · US
Catalyst layer forming method, catalyst layer forming system and recording medium
US-9966306-B2 · May 8, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 54 |
| Inatomi Yuichiro | 2 |
| Tanaka Takashi | 2 |
| Iwashita Mitsuaki | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C18/1619 | 32 |
| H10P14/46 | 30 |
| C23C18/1632 | 25 |
| C23C18/163 | 20 |
| H10W20/033 | 19 |