Method for plasma etching vertical features in a silicon-based semiconductor layer of a substrate
US-2026101689-A1 · Apr 9, 2026 · US
Tokyo Electron Ltd holds 12,835 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 12,835 |
| Recent patents | 3,890 |
| First publication | Jan 1, 2015 |
| Latest publication | Apr 9, 2026 |
Year-over-year patent counts for this assignee.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 1,002 |
| 2016 | 869 |
| 2017 | 860 |
| 2018 | 904 |
| 2019 | 959 |
| 2020 | 1,179 |
| 2021 | 1,295 |
| 2022 | 1,353 |
| 2023 | 1,239 |
| 2024 | 1,246 |
| 2025 | 1,521 |
| 2026 | 408 |
Latest publications where this party is an assignee.
US-2026101689-A1 · Apr 9, 2026 · US
US-2026101692-A1 · Apr 9, 2026 · US
US-2026100340-A1 · Apr 9, 2026 · US
US-2026101719-A1 · Apr 9, 2026 · US
US-2026101691-A1 · Apr 9, 2026 · US
Representative or frequently cited publications from precomputed assignee stats.
US-2026101689-A1 · Apr 9, 2026 · US
US-2026101692-A1 · Apr 9, 2026 · US
US-2026100340-A1 · Apr 9, 2026 · US
US-2026101719-A1 · Apr 9, 2026 · US
US-2026101691-A1 · Apr 9, 2026 · US
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P50/242 | 2,284 |
| H10P50/283 | 1,952 |
| H10P72/0421 | 1,764 |
| H10P72/0402 | 1,537 |
| H01J2237/334 | 1,518 |
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 12,072 |
| Chemistry & Metallurgy | 3,779 |
| Physics | 3,082 |
| Operations & Transport | 2,519 |
| Cross-Sectional Technologies | 488 |
| Mechanical Engineering | 474 |
| Human Necessities | 20 |
| Textiles & Paper | 4 |
| Fixed Constructions | 1 |
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