Bonding apparatus and bonding system
US-2018047699-A1 · Feb 15, 2018 · US
US12598939B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12598939-B2 |
| Application number | US-202117235780-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 20, 2021 |
| Priority date | Oct 25, 2018 |
| Publication date | Apr 7, 2026 |
| Grant date | Apr 7, 2026 |
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Provided is a substrate bonding apparatus comprising: a first holding unit for holding a first substrate; and a second holding unit for holding a second substrate, wherein the substrate bonding apparatus is configured to bond the first substrate and the second substrate by, after forming a contact region between a part of the first substrate and a part of the second substrate, expanding the contact region to form an initially bonded region and releasing the second substrate having the initially bonded region formed thereon from the second holding unit.
Opening claim text (preview).
What is claimed is: 1 . A substrate bonding apparatus comprising: a first holder configured to hold a first substrate; and a second holder configured to hold a second substrate, wherein the substrate bonding apparatus is configured to bond the first substrate and the second substrate by; forming a contact region between a part of the first substrate and a part of the second substrate; after forming the contact region, expanding the contact region so as to form an initiall…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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