Method and apparatus for producing semiconductor device
US-2015050778-A1 · Feb 19, 2015 · US
Substrate holder and method for bonding two substrates
US2018040495A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018040495-A1 |
| Application number | US-201515551733-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 10, 2015 |
| Priority date | Apr 10, 2015 |
| Publication date | Feb 8, 2018 |
| Grant date | — |
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Abstract
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A substrate holder having a fixing surface for holding a substrate, a system having such a substrate holder, a use of such a substrate holder, a method for bonding two substrates and a product, particularly a substrate stack, produced using such a method and also a use of such a substrate holder for such a method.
First claim
Opening claim text (preview).
1 - 19 . (canceled) 20 . A substrate holder comprising: a fixing surface for holding a substrate; a heat-conducting body for dissipating heat away from the fixing surface, wherein the heat is dissipated to a rear side of the substrate holder; and a heat exchanger arranged at the rear side of the substrate holder for dissipating the heat. 21 . The substrate holder according to claim 20 , wherein the heat-conducting body includes ribs for dissipa…
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Classifications
Electricity · mapped topic
- H10P72/0428Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10P72/18Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US2018040495A1 cover?
- A substrate holder having a fixing surface for holding a substrate, a system having such a substrate holder, a use of such a substrate holder, a method for bonding two substrates and a product, particularly a substrate stack, produced using such a method and also a use of such a substrate holder for such a method.
- Who is the assignee on this patent?
- Ev Group E Thallner Gmbh
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0428. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Feb 08 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).