Developing method, developing apparatus, and storage medium
US-2026023324-A1 · Jan 22, 2026 · US
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Kodama Teruhiko patents
Kodama Teruhiko is listed as an inventor on 41 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kodama Teruhiko |
| Total patents | 41 |
| First publication | Sep 10, 2015 |
| Latest publication | Jan 22, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate warpage correction method, computer storage medium, and substrate warpage correction apparatus
US-12491600-B2 · Dec 9, 2025 · US
Substrate processing apparatus and substrate processing method
US-2025367701-A1 · Dec 4, 2025 · US
Substrate treatment method, substrate treatment apparatus, and computer storage medium
US-2025321490-A1 · Oct 16, 2025 · US
Substrate processing apparatus and substrate processing method
US-12409470-B2 · Sep 9, 2025 · US
Substrate processing apparatus and substrate processing method
US-12230515-B2 · Feb 18, 2025 · US
Hydrophobization treatment apparatus, hydrophobization treatment method, and computer storage medium
US-2025050377-A1 · Feb 13, 2025 · US
Substrate processing apparatus and substrate processing method
US-2024213046-A1 · Jun 27, 2024 · US
Substrate processing apparatus and substrate processing method
US-2024189856-A1 · Jun 13, 2024 · US
Substrate processing apparatus and substrate processing method
US-11887869-B2 · Jan 30, 2024 · US
Recent patents
Latest publications not already listed above.
Substrate processing method, substrate processing apparatus, and storage medium
US-11693319-B2 · Jul 4, 2023 · US
Substrate processing apparatus, substrate processing method and storage medium
US-2023197475-A1 · Jun 22, 2023 · US
Substrate cleaning apparatus and substrate cleaning method
US-11554389-B2 · Jan 17, 2023 · US
Substrate processing apparatus
US-11532487-B2 · Dec 20, 2022 · US
Substrate processing method, substrate processing apparatus, and storage medium
US-2022113628-A1 · Apr 14, 2022 · US
Substrate processing capable of suppressing a decrease in throughput while reducing the impact on exposure treatment caused by warping of a substrate
US-11287798-B2 · Mar 29, 2022 · US
Substrate processing apparatus and substrate processing method
US-2021398827-A1 · Dec 23, 2021 · US
Substrate processing apparatus and substrate processing method
US-11139182-B2 · Oct 5, 2021 · US
Substrate treatment apparatus, substrate treatment method, and computer storage medium
US-11126086-B2 · Sep 21, 2021 · US
Substrate cleaning apparatus and substrate cleaning method
US-2021220878-A1 · Jul 22, 2021 · US
Substrate warpage correction method, computer storage medium, and substrate warpage correction apparatus
US-2021039221-A1 · Feb 11, 2021 · US
Substrate processing apparatus and substrate processing method
US-2020365417-A1 · Nov 19, 2020 · US
Substrate processing apparatus, substrate processing method and storage medium
US-10840079-B2 · Nov 17, 2020 · US
Substrate processing apparatus, substrate processing method and storage medium
US-10649335-B2 · May 12, 2020 · US
Substrate processing apparatus, substrate processing method and memory medium
US-2020096966-A1 · Mar 26, 2020 · US
Substrate processing apparatus, substrate processing method and memory medium
US-10528028-B2 · Jan 7, 2020 · US
Substrate treatment apparatus, substrate treatment method, and computer storage medium
US-2019212653-A1 · Jul 11, 2019 · US
Substrate processing apparatus and substrate processing method
US-2019181022-A1 · Jun 13, 2019 · US
Substrate processing method and substrate processing apparatus
US-10074542-B2 · Sep 11, 2018 · US
Substrate processing apparatus, substrate processing method and storage medium
US-2018253007-A1 · Sep 6, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 41 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7612 | 17 |
| H10P72/0414 | 15 |
| H10P72/0474 | 12 |
| H10P72/0412 | 12 |
| H10P52/00 | 12 |