Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-2024301584-A1 · Sep 12, 2024 · US
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Tobin Jeffrey patents
Tobin Jeffrey is listed as an inventor on 37 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tobin Jeffrey |
| Total patents | 37 |
| First publication | Feb 12, 2015 |
| Latest publication | Sep 12, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Inductive plasma source with metallic shower head using b-field concentrator
US-11450509-B2 · Sep 20, 2022 · US
Method and apparatus for selective nitridation process
US-10950698-B2 · Mar 16, 2021 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-10837122-B2 · Nov 17, 2020 · US
Inductive plasma source with metallic shower head using b-field concentrator
US-2020144027-A1 · May 7, 2020 · US
Showerhead design
US-10626500-B2 · Apr 21, 2020 · US
Apparatus and methods for backside passivation
US-10535513-B2 · Jan 14, 2020 · US
Inductive plasma source with metallic shower head using B-field concentrator
US-10529541-B2 · Jan 7, 2020 · US
Susceptor design to eliminate deposition valleys in the wafer
US-10519547-B2 · Dec 31, 2019 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-2019382917-A1 · Dec 19, 2019 · US
Recent patents
Latest publications not already listed above.
Substrate transfer mechanisms
US-10453733-B2 · Oct 22, 2019 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-10428441-B2 · Oct 1, 2019 · US
Showerhead design
US-2019194810-A1 · Jun 27, 2019 · US
Method and apparatus for selective nitridation process
US-2019088485-A1 · Mar 21, 2019 · US
Showerhead design
US-10221483-B2 · Mar 5, 2019 · US
Support cylinder for thermal processing chamber
US-10128144-B2 · Nov 13, 2018 · US
Method and apparatus for selective nitridation process
US-10049881-B2 · Aug 14, 2018 · US
Substrate transfer mechanisms
US-2018182660-A1 · Jun 28, 2018 · US
Substrate carrier system
US-9929029-B2 · Mar 27, 2018 · US
Substrate transfer mechanisms
US-9905454-B2 · Feb 27, 2018 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-2018016705-A1 · Jan 18, 2018 · US
Support cylinder for thermal processing cylinder
US-2017263493-A1 · Sep 14, 2017 · US
Inductive plasma source with metallic shower head using b-field concentrator
US-2017194128-A1 · Jul 6, 2017 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-9683308-B2 · Jun 20, 2017 · US
Support cylinder for thermal processing chamber
US-9659809-B2 · May 23, 2017 · US
Substrate carrier system
US-2017110352-A1 · Apr 20, 2017 · US
Minimal contact edge ring for rapid thermal processing
US-9558982-B2 · Jan 31, 2017 · US
Support cylinder for thermal processing chamber
US-2016300752-A1 · Oct 13, 2016 · US
Minimal contact edge ring for rapid thermal processing
US-9403251-B2 · Aug 2, 2016 · US
Susceptor design to eliminate deposition valleys in the wafer
US-2016215393-A1 · Jul 28, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 37 |
| Rogers Matthew S | 1 |
| Curtis Roger | 1 |
| Hawrylchak Lara | 1 |
| Lai Ken Kaung | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0436 | 20 |
| H01L21/67115 | 14 |
| H10P72/7611 | 13 |
| H10P50/242 | 12 |
| H01L21/68735 | 10 |