Method and apparatus for selective nitridation process
US-10049881-B2 · Aug 14, 2018 · US
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Rogers Matthew S patents
Rogers Matthew S holds 2 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 2 |
| Recent patents | 0 |
| First publication | Mar 31, 2015 |
| Latest publication | Aug 14, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Interlayer polysilicon dielectric cap and method of forming thereof
US-8994089-B2 · Mar 31, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method and apparatus for selective nitridation process
US-10049881-B2 · Aug 14, 2018 · US
Interlayer polysilicon dielectric cap and method of forming thereof
US-8994089-B2 · Mar 31, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10D64/035 | 2 |
| H01L21/28273 | 2 |
| H10P72/0454 | 1 |
| H01L27/11521 | 1 |
| H01L21/67167 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 2 |