Substrate carrier system

Patent metadata

Field	Value
Publication number	US-9929029-B2
Application number	US-201615292680-A
Country	US
Kind code	B2
Filing date	Oct 13, 2016
Priority date	Oct 15, 2015
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

Embodiments described herein relate to a substrate carrier system. The substrate carrier system includes a carrier for transferring a substrate within a multi-chamber processing system. The carrier may be placed in a load lock chamber for receiving the substrate, and the substrate is transferred to a processing chamber on the carrier. In the processing chamber, the carrier, with substrate, is disposed on a susceptor. The carrier can also enhance thermal control of the edge of the substrate in the processing chamber. The substrate carrier system further includes positioning features for repeatable positioning of the substrate in the processing chamber and repeatable positioning of the carrier in the load lock chamber and the processing chamber.

First claim

The invention claimed is:

1. A load lock chamber, comprising:
a chamber body defining an enclosure;
a substrate positioning assembly disposed in the enclosure, the substrate positioning assembly comprising a gas cushion member;
an actuated substrate alignment assembly disposed in the enclosure around the substrate positioning assembly; and
a brake assembly positioned to engage the substrate positioning assembly, wherein the brake assembly comprises:
a plurality of brake pins disposed through a plurality of openings in a wall of the chamber body and coupled to a brake support; and
an actuator coupled to the brake support.

2. The load lock chamber of claim 1 , wherein the substrate positioning assembly comprises a bearing plate, a plurality of support pins coupled to the bearing plate, and a gas cushion member positioned to support the bearing plate.

3. The load lock chamber of claim 2 , wherein each support pin has a soft tip.

4. The load lock chamber of claim 1 , wherein the substrate alignment assembly comprises an alignment support and an alignment member connected to the alignment support.

5. The load lock chamber of claim 4 , wherein the alignment support includes an axial portion with a first end and a second end, an extension from the first end that connects the alignment member to the alignment support, and a shelf that extends from the second end.

6. The load lock chamber of claim 5 , further comprising a carrier removably disposed on the shelf.

7. The load lock chamber of claim 6 , wherein the carrier and the shelf have matching alignment features.

8. The load lock chamber of claim 1 , wherein the brake assembly further comprises a seal member disposed around the plurality of openings in the wall.

9. The load lock chamber of claim 1 , wherein the substrate alignment assembly comprises an alignment support, an alignment member connected to the alignment support, a positioner coupled to the alignment support, and an actuator coupled to the positioner.

10. The load lock chamber of claim 9 , wherein the positioner is disposed through an opening in a wall of the chamber body.

11. The load lock chamber of claim 9 , wherein the alignment member is at least a portion of a ring and includes a plurality of alignment pins disposed at an inner radius of the alignment member.

12. The load lock chamber of claim 11 , wherein each alignment pin has a sloping inner edge.

13. A load lock chamber, comprising:
a chamber body defining an enclosure;
a substrate positioning assembly disposed in the enclosure, the substrate positioning assembly comprising a gas cushion member;
an actuated substrate alignment assembly disposed in the enclosure around the substrate positioning assembly, the substrate alignment assembly comprising:
an alignment support; and
an alignment member connected to the alignment support, the alignment member having an inner radius and a plurality of alignment pins disposed at the inner radius; and

a brake assembly positioned to engage the substrate positioning assembly, wherein the brake assembly comprises:
a plurality of brake pins disposed through a plurality of openings in a wall of the chamber body and coupled to a brake support;
an actuator coupled to the brake support; and
a seal member disposed around the plurality of openings.

14. The load lock chamber of claim 13 , wherein the substrate positioning assembly comprises a bearing plate, a plurality of support pins coupled to the bearing plate, each of the support pins having a soft tip, and a gas cushion member positioned to support the bearing plate.

15. The load lock chamber of claim 13 , wherein the alignment assembly is actuated to move between a substrate alignment position and a substrate transportation position.

16. The load lock chamber of claim 13 , wherein the substrate alignment assembly further comprises:
a positioner coupled to the alignment support;
a linear actuator coupled to the positioner; and
a lateral force detector coupled to the positioner.

17. A load lock chamber, comprising:
a chamber body defining an enclosure;
a substrate positioning assembly disposed in the enclosure, the substrate positioning assembly comprising a plurality of support pins having soft tips, a bearing plate coupled to the plurality of pins, and a gas cushion positioned to support the bearing plate;
an actuated substrate alignment assembly disposed in the enclosure around the substrate positioning assembly, the substrate alignment assembly comprising:
an alignment support having an axial portion, a first extension at a first end of the axial portion, and a shelf at a second end of the axial portion; and
an alignment member connected to the alignment support by the first extension, the alignment member having an inner radius and a plurality of alignment pins disposed at the inner radius, each alignment pin having a sloping inner edge;
a positioner coupled to the alignment support; and
an actuator coupled to the positioner; and

a brake assembly positioned to engage the substrate positioning assembly, the brake assembly comprising a plurality of brake pins disposed through a plurality of openings in a wall of the chamber body and coupled to a brake support, an actuator coupled to the brake support, and a seal member disposed around the plurality of openings.

18. The load lock chamber of claim 17 , further comprising a carrier removably disposed on the shelf.

Assignees

• Applied Materials Inc

Inventors

• Tobin Jeffrey

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/0466 Primary

  characterised by the construction of the load-lock chamber · CPC title