Liner assemblies for substrate processing systems
US-12071686-B2 · Aug 27, 2024 · US
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Thomas Shawn George patents
Thomas Shawn George is listed as an inventor on 50 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Thomas Shawn George |
| Total patents | 50 |
| First publication | Mar 10, 2016 |
| Latest publication | Aug 27, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Methods for preparing a SOI structure
US-11798835-B2 · Oct 24, 2023 · US
Liner assemblies for substrate processing systems
US-2023257879-A1 · Aug 17, 2023 · US
High resistivity semiconductor-on-insulator wafer and a method of manufacture
US-11699615-B2 · Jul 11, 2023 · US
Liner assemblies for substrate processing systems
US-11668006-B2 · Jun 6, 2023 · US
CVD apparatus
US-11598021-B2 · Mar 7, 2023 · US
High resistivity SOI wafers and a method of manufacturing thereof
US-11594446-B2 · Feb 28, 2023 · US
Liner assemblies for substrate processing systems
US-11345996-B2 · May 31, 2022 · US
Methods for preparing a soi structure
US-2022165609-A1 · May 26, 2022 · US
Methods for removing an oxide film from a SOI structure and methods for preparing a SOI structure
US-11282739-B2 · Mar 22, 2022 · US
Recent patents
Latest publications not already listed above.
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
US-11239107-B2 · Feb 1, 2022 · US
High resistivity semiconductor-on-insulator wafer and a method of manufacture
US-2021384070-A1 · Dec 9, 2021 · US
High resistivity soi wafers and a method of manufacturing thereof
US-2021327750-A1 · Oct 21, 2021 · US
High resistivity semiconductor-on-insulator wafer and a method of manufacturing
US-11139198-B2 · Oct 5, 2021 · US
High resistivity SOI wafers and a method of manufacturing thereof
US-11081386-B2 · Aug 3, 2021 · US
Methods for removing an oxide film from a soi structure and methods for preparing a soi structure
US-2021183692-A1 · Jun 17, 2021 · US
Liner assemblies for substrate processing systems
US-2021147980-A1 · May 20, 2021 · US
High resistivity SOI wafers and a method of manufacturing thereof
US-10910257-B2 · Feb 2, 2021 · US
Liner assemblies for substrate processing systems
US-10907251-B2 · Feb 2, 2021 · US
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
US-2021013093-A1 · Jan 14, 2021 · US
High resistivity soi wafers and a method of manufacturing thereof
US-2021005507-A1 · Jan 7, 2021 · US
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
US-10832937-B1 · Nov 10, 2020 · US
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
US-2020335389-A1 · Oct 22, 2020 · US
Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress
US-10784146-B2 · Sep 22, 2020 · US
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
US-10741437-B2 · Aug 11, 2020 · US
Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress
US-10658227-B2 · May 19, 2020 · US
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
US-2020126847-A1 · Apr 23, 2020 · US
Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress
US-2020126848-A1 · Apr 23, 2020 · US
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
US-10546771-B2 · Jan 28, 2020 · US
Method of manufacturing silicon germanium-on-insulator
US-10510583-B2 · Dec 17, 2019 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Globalwafers Co Ltd | 46 |
| Sunedison Semiconductor Ltd Uen201334164H | 9 |
| Sunedison Semiconductor Ltd | 2 |
| Globalwafters Co Ltd | 1 |
| Sunedison Semiconductor Ltd Uen2013341164H | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10W10/181 | 36 |
| H10P90/1916 | 33 |
| H01L21/76254 | 32 |
| H10P14/3411 | 20 |
| H10P14/3211 | 19 |