Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress

Patent metadata

Field	Value
Publication number	US-10658227-B2
Application number	US-201816186683-A
Country	US
Kind code	B2
Filing date	Nov 12, 2018
Priority date	Mar 3, 2015
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

A semiconductor on insulator multilayer structure is provided. The multilayer comprises a high resistivity single crystal semiconductor handle substrate, a textured oxide, nitride, or oxynitride layer, a polycrystalline silicon layer, a dielectric layer, and a single crystal semiconductor device layer. The multilayer structure is prepared in a manner that reduces wafer bow.

First claim

What is claimed is:

1. A method of preparing a multilayer structure, the method comprising:
forming a semiconductor oxide layer, a semiconductor nitride layer, or a semiconductor oxynitride layer in interfacial contact with a front surface of a single crystal semiconductor handle substrate, the single crystal semiconductor handle substrate comprising two major, generally parallel surfaces, one of which is the front surface of the single crystal semiconductor handle substrate and the other of which is a back surface of the single crystal semiconductor handle substrate, a circumferential edge joining the front and back surfaces of the single crystal semiconductor handle substrate, a central plane between the front surface and the back surface of the single crystal semiconductor handle substrate, and a bulk region between the front and back surfaces of the single crystal semiconductor handle substrate, wherein the single crystal semiconductor handle substrate has a minimum bulk region resistivity of at least about 500 ohm-cm;
annealing the single crystal semiconductor handle substrate comprising the semiconductor oxide layer, the semiconductor nitride layer, or the semiconductor oxynitride layer in interfacial contact with the front surface thereof in an ambient atmosphere comprising a gas selected from the group consisting of hydrogen, hydrogen chloride, chlorine, and any combination thereof, wherein the anneal of the single crystal semiconductor handle substrate comprising the semiconductor oxide layer, the semiconductor nitride layer, or the semiconductor oxynitride layer forms a textured semiconductor oxide layer comprising holes having sizes between about 5 nanometers and about 1000 nanometers, a textured semiconductor nitride layer comprising holes having sizes between about 5 nanometers and about 1000 nanometers, or a textured semiconductor oxynitride layer comprising holes having sizes between about 5 nanometers and about 1000 nanometers;
depositing a polycrystalline silicon layer on the textured semiconductor oxide layer, the textured semiconductor nitride layer, or the textured semiconductor oxynitride layer in interfacial contact with the front surface the single crystal semiconductor handle substrate, wherein the polycrystalline silicon layer is deposited by chemical vapor deposition; and
bonding a dielectric layer on a front surface of a single crystal semiconductor donor substrate to the polycrystalline silicon layer of the single crystal semiconductor handle substrate to thereby form a bonded structure, wherein the single crystal semiconductor donor substrate comprises two major, generally parallel surfaces, one of which is the front surface of the semiconductor donor substrate and the other of which is a back surface of the semiconductor donor substrate, a circumferential edge joining the front and back surfaces of the semiconductor donor substrate, and a central plane between the front and back surfaces of the semiconductor donor substrate.

2. The method of claim 1 wherein the single crystal semiconductor handle substrate comprises a single crystal silicon handle wafer, and the semiconductor nitride layer comprises silicon nitride.

3. The method of claim 1 wherein the single crystal semiconductor handle substrate comprises a single crystal silicon handle wafer, and the semiconductor oxynitride layer comprises silicon oxynitride.

4. The method of claim 1 wherein the semiconductor nitride layer is deposited on the front surface of the single crystal semiconductor handle substrate, wherein the semiconductor nitride layer is formed by exposing the single crystal semiconductor handle substrate to a nitriding medium selected from the group consisting of nitrogen, ammonia, and a combination thereof.

5. The method of claim 4 wherein the semiconductor nitride layer has a thickness between about 0.1 nanometers and about 25 nanometers.

6. The method of claim 1 wherein the semiconductor oxynitride layer is deposited on the front surface of the single crystal semiconductor handle substrate, wherein the semiconductor oxynitride layer is formed by exposing the single crystal semiconductor handle substrate to a nitriding medium selected from the group consisting of nitrogen, ammonia, and a combination thereof, and an oxidizing medium selected from the group consisting of air, ozone, and an aqueous composition comprising an oxidizing agent.

7. The method of claim 6 wherein the semiconductor oxynitride layer or the semiconductor oxynitride layer has a thickness between about 0.1 nanometers and about 25 nanometers.

8. The method of claim 1 wherein the single crystal semiconductor handle substrate has a bulk resistivity between about 500 Ohm-cm and about 100,000 Ohm-cm, or between about 1000 Ohm-cm and about 100,000 Ohm-cm.

9. The method of claim 1 wherein the single crystal semiconductor handle substrate has a bulk resistivity between about 1000 ohm cm and about 10,000 Ohm-cm, or between about 2000 Ohm cm and about 10,000 Ohm-cm.

10. The method of claim 1 wherein the single crystal semiconductor handle substrate has a bulk resistivity between about 3000 Ohm-cm and about 10,000 Ohm-cm, or between about 3000 Ohm cm and about 5,000 Ohm-cm.

11. The method of claim 1 wherein the single crystal semiconductor handle substrate comprising the semiconductor oxide layer, the semiconductor nitride layer, or the semiconductor oxynitride layer in interfacial contact with the front surface thereof is annealed in an ambient atmosphere comprising hydrogen gas and a gas selected from the group consisting of hydrogen chloride, chlorine, and a combination of hydrogen chloride and chlorine.

12. The method of claim 1 wherein the single crystal semiconductor handle substrate comprising the semiconductor oxide layer, the semiconductor nitride layer, or the semiconductor oxynitride layer in interfacial contact with the front surface thereof is annealed in an ambient atmosphere comprising a gas selected from the group consisting of hydrogen, hydrogen chloride, chlorine, and any combination thereof at a temperature greater than about 850° C.

13. The method of claim 1 wherein the polycrystalline silicon layer is deposited from a deposition ambient atmosphere comprising a silicon precursor selected from the group consisting of silane, trichlorosilane, dichlorosilane, and any combination thereof at a deposition rate of at least about 0.1 micrometer/minute.

14. The method of claim 1 wherein the polycrystalline silicon layer is deposited from a deposition ambient atmosphere comprising a silicon precursor selected from the group consisting of silane, trichlorosilane, dichlorosilane, and any combination thereof at a deposition rate between about 0.1 micrometer/minute to about 2 micrometers/minute.

15. The method of claim 1 wherein deposition by chemical vapor deposition of the polycrystalline silicon layer is interrupted after deposition of a polycrystalline silicon seed layer, and further wherein the polycrystalline seed layer is annealed at a temperature greater than about 1000° C.

16. The method of claim 15 wherein the polycrystalline silicon seed layer has a thickness of less than 3 micrometers.

17. The method of claim 15 wherein deposition by chemical vapor deposition of the polycrystalline silicon layer is resumed after cooling the single crystal semiconductor handle substrate to a temperature between about 850° C. and about 1000° C.

18. The method of claim 1 wherein deposition by chemical vapor deposition of the polycrystalline silicon layer is interrupted after deposition of a polycrystall

Assignees

• Globalwafers Co Ltd

Inventors

• Wang Gang
• Libbert Jeffrey L
• Thomas Shawn George
• Peidous Igor

Classifications

• H01L21/76254 Primary

  Electricity · mapped topic

• H01L21/0245

  Electricity · mapped topic

• H01L21/02532

  Electricity · mapped topic

• H01L21/02488

  Electricity · mapped topic

• H01L21/763

  Electricity · mapped topic