Showerhead assembly and components
US-2026035793-A1 · Feb 5, 2026 · US
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Terhorst Herbert patents
Terhorst Herbert is listed as an inventor on 51 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Terhorst Herbert |
| Total patents | 51 |
| First publication | Aug 27, 2015 |
| Latest publication | Feb 5, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus for processing a plurality of substrates provided with an extractor chamber
US-2025389485-A1 · Dec 25, 2025 · US
Manifolds for uniform vapor deposition
US-2025361611-A1 · Nov 27, 2025 · US
Showerhead assembly and components
US-12467140-B2 · Nov 11, 2025 · US
Diffuser for uniform gas delivery in cross-flow reactors
US-2025327182-A1 · Oct 23, 2025 · US
Vessel for containing precursor
US-2025293059-A1 · Sep 18, 2025 · US
Manifolds for uniform vapor deposition
US-12416081-B2 · Sep 16, 2025 · US
Substrate susceptor using edge purging
US-12406871-B2 · Sep 2, 2025 · US
Apparatus for processing a plurality of substrates provided with an extractor chamber
US-12366410-B2 · Jul 22, 2025 · US
Support sleeve for supporting a process vessel and associated semiconductor processing furnaces
US-2025174475-A1 · May 29, 2025 · US
Recent patents
Latest publications not already listed above.
Semiconductor manufacturing apparatus and process
US-2025092520-A1 · Mar 20, 2025 · US
Apparatus constructed and arranged to process a plurality of substrates
US-2025069911-A1 · Feb 27, 2025 · US
Substrate processing apparatus with an injector
US-12195852-B2 · Jan 14, 2025 · US
Verticle furnace for processing a plurality of substrates and method of processing
US-2024420971-A1 · Dec 19, 2024 · US
Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas
US-2024392435-A1 · Nov 28, 2024 · US
Substrate processing apparatus with an injector
US-2024384411-A1 · Nov 21, 2024 · US
Solid source chemical vaporizer
US-2024360554-A1 · Oct 31, 2024 · US
Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas
US-12077854-B2 · Sep 3, 2024 · US
Semiconductor processing device with edge purging
US-2024254629-A1 · Aug 1, 2024 · US
Reactant vaporizer and related systems and methods
US-2024209501-A1 · Jun 27, 2024 · US
High-throughput silicon carbide reactor
US-2024175130-A1 · May 30, 2024 · US
Gas injector assembly
US-2024145262-A1 · May 2, 2024 · US
Batch furnace assembly and method of operating a batch furnace assembly
US-11971217-B2 · Apr 30, 2024 · US
Reactant vaporizer and related systems and methods
US-11926894-B2 · Mar 12, 2024 · US
Substrate processing apparatus
US-2024068097-A1 · Feb 29, 2024 · US
Semiconductor processing device with wafer edge purging
US-2023207377-A1 · Jun 29, 2023 · US
System and apparatus for gas distribution
US-2023088313-A1 · Mar 23, 2023 · US
Apparatus for processing a plurality of substrates provided with an extractor chamber
US-2023008684-A1 · Jan 12, 2023 · US
Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas
US-2023008131-A1 · Jan 12, 2023 · US
Chemical vapor depospition furnace for depositing films
US-2023002889-A1 · Jan 5, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asm Ip Holding Bv | 51 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45544 | 23 |
| H10P72/0402 | 23 |
| C23C16/45561 | 18 |
| C23C16/4583 | 15 |
| H10P72/0431 | 14 |