Solid source chemical vaporizer

Patent metadata

Field	Value
Publication number	US-2024360554-A1
Application number	US-202418648094-A
Country	US
Kind code	A1
Filing date	Apr 26, 2024
Priority date	Apr 28, 2023
Publication date	Oct 31, 2024
Grant date	—

Abstract

A solid source chemical vaporizer, an assembly of solid source chemical vaporizers, a substrate processing system comprising the solid source chemical vaporizer or the assembly and a method of forming a layer is disclosed. Embodiments of the presently described solid source chemical vaporizer comprise a vessel, a gas inlet, a gas outlet and a channel.

First claim

1 . A solid source chemical vaporizer for providing a vapor of a solid precursor, comprising:
a vessel having walls defining an interior volume and a lid for closing the interior volume, a gas inlet and a gas outlet, a channel constructed and arranged to hold the solid precursor within the interior volume and extending between the gas inlet and the gas outlet, thereby defining a flow path from the gas inlet to the gas outlet, wherein the channel is constructed with a cross-sectional area perpendicular to the flow path that is reduced along the flow path of the channel from the gas inlet to the gas outlet.

2 . The solid source chemical vaporizer according to claim 1 , wherein the channel comprises a bottom surface having a surface profile that is designed to reduce height of the channel so that a decreasing amount of solid precursor is held in the channel near the gas outlet.

3 . The solid source chemical vaporizer according to claim 2 , wherein the bottom surface comprises a first bottom surface and a second bottom surface, the second bottom surface being inclined with respect to the first bottom surface.

4 . The solid source chemical vaporizer according to claim 3 , wherein the second bottom surface is at a downstream of the flow path.

5 . The solid source chemical vaporizer according to claim 3 , wherein the second bottom surface is comprised within at least 25% of the bottom surface.

6 . The solid source chemical vaporizer according to claim 5 , wherein the second bottom surface is comprised within at least 10% of the bottom surface.

7 . The solid source chemical vaporizer according to claim 1 , wherein the channel comprises a plurality of channels, wherein the plurality of channels comprises a plurality of elongated portions and a plurality of substantially bowed portions.

8 . The solid source chemical vaporizer according to claim 7 , wherein each of plurality of elongated portions is connected to each of the plurality of substantially bowed portions, thereby forming a serpentine-shaped flow path.

9 . The solid source chemical vaporizer according to claim 7 , wherein each of the plurality of substantially bowed portions is connected to each other, thereby forming a spiral-shaped flow path.

10 . The solid source chemical vaporizer according to claim 1 , further comprising a heating elements for providing thermal energy to the vessel.

11 . The solid source chemical vaporizer according to claim 1 , wherein the channel is integrally formed within the vessel.

12 . The solid source chemical vaporizer according to claim 1 , wherein the channel is integrally formed within a tray, the tray being receivable in the interior volume of the vessel.

13 . An assembly of solid source chemical vaporizers for providing a vapor of a solid precursor, the assembly comprising a plurality of solid source chemical vaporizers connected to one another, each of the plurality of solid source chemical vaporizers comprising:
a vessel having walls defining an interior volume and a lid for closing the interior volume, a gas inlet and a gas outlet, a channel constructed and arranged to hold the solid precursor within the interior volume, and extending between the gas inlet and the gas outlet, thereby defining a flow path from the gas inlet to the gas outlet, wherein the channel is constructed with a cross sectional area perpendicular to the flow path that is substantially constant along the flow path of the channel from the gas inlet to the gas outlet, and wherein the substantially constant cross sectional area of the channel of each of the plurality of solid source chemical vaporizers is different from one another.

14 . The assembly of solid source chemical vaporizers according to claim 13 , wherein each of the plurality of solid source chemical vaporizers is connected in series to one another along the flow path as a function of decreasing cross sectional area, so that a decreasing amount of solid precursor is held in the channel of each of the plurality of solid source chemical vaporizers.

15 . A substrate processing system, comprising:
a substrate processing apparatus comprising a process chamber constructed and arranged to receive at least one substrate, and one of:
a solid source chemical vaporizer comprising:
a vessel having walls defining an interior volume and a lid for closing the interior volume,
a gas inlet and a gas outlet,
a channel constructed and arranged to hold the solid precursor within the interior volume and extending between the gas inlet and the gas outlet, thereby defining a flow path from the gas inlet to the gas outlet,
wherein the channel is constructed with a cross-sectional area perpendicular to the flow path that is reduced along the flow path of the channel from the gas inlet to the gas outlet, or

an assembly of solid source chemical vaporizers according to claim 13 ,
wherein the one of the solid source chemical vaporizer or the assembly being operably connected to the substrate processing apparatus.

16 . The substrate processing system according to claim 15 , wherein the substrate processing apparatus is a vertical furnace for processing a plurality of substrates.

17 . A method of forming a layer on a substrate, comprising:
providing at least one substrate to a processing chamber, the processing chamber being comprised in a substrate processing apparatus, providing a vapor of a solid precursor to the process chamber, thereby forming a layer on the at least one substrate, wherein the providing of the vapor comprises providing one of:
a solid source chemical vaporizer comprising:
a vessel having walls defining an interior volume and a lid for closing the interior volume,
a gas inlet and a gas outlet,
a channel constructed and arranged to hold the solid precursor within the interior volume and extending between the gas inlet and the gas outlet, thereby defining a flow path from the gas inlet to the gas outlet,
wherein the channel is constructed with a cross-sectional area perpendicular to the flow path that is reduced along the flow path of the channel from the gas inlet to the gas outlet, or

an assembly of solid source chemical vaporizers according to claim 13 ,
wherein the solid source chemical vaporizer or the assembly being operably connected to a substrate processing apparatus,
providing thermal energy to the vessel of the solid source chemical vaporizer, thereby forming the vapor of the solid precursor, and
guiding the vapor of the solid precursor from the vessel to the substrate processing apparatus.

18 . The method according to claim 17 , wherein the providing of the vapor is comprised in a deposition cycle and wherein the deposition cycle is executed a plurality of times, thereby forming the layer on the at least one substrate.

19 . The method according to claim 17 , wherein the solid precursor is a transition metal chloride.

Assignees

• Asm Ip Holding Bv

Inventors

• Proserpio Davide
• Oosterlaken Theodorus G M
• Terhorst Herbert
• Ernur Didem

Classifications

• C23C16/4481 Primary

  by evaporation using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title

• C23C14/0021

  Reactive sputtering or evaporation · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• C23C16/45553

  characterized by the use of precursors specially adapted for ALD · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title