Verticle furnace for processing a plurality of substrates and method of processing

Patent metadata

Field	Value
Publication number	US-2024420971-A1
Application number	US-202418741168-A
Country	US
Kind code	A1
Filing date	Jun 12, 2024
Priority date	Jun 14, 2023
Publication date	Dec 19, 2024
Grant date	—

Abstract

A vertical furnace and a method for processing a plurality of substrates in said vertical furnace is disclosed. Embodiments of the presently described vertical furnace comprise a process chamber, a heating element configured to provide the heat to reach the desired process temperature for the processing of the plurality of substrates. The vertical furnace may further comprise heat distributing member for distributing the heat provided by the heating element. Embodiments of the presently described method comprise processing the plurality of substrates in a vertical furnace described herein.

First claim

1 . A vertical furnace for processing a plurality of substrates, comprising:
an inner reaction tube extending in a longitudinal direction and constructed and arranged to receive a plurality of substrates arranged in a substrate carrier, the substrate carrier provided with a top plate, an outer reaction tube constructed and arranged around the inner reaction tube along the longitudinal direction, a heating element constructed and arranged around the outer reaction tube along the longitudinal direction,
wherein,
the vertical furnace further comprises a heat distributing member constructed and arranged to face the top plate of the substrate carrier and at least partially overlap with the top plate when the substrate carrier is received in the inner reaction tube to distribute the heat provided by the heating element towards a central portion of the substrate.

2 . The vertical furnace according to claim 1 , wherein the inner reaction tube is delimited by a closed top end and wherein the heat distributing member is provided to the closed top end.

3 . The vertical furnace according to claim 2 , wherein the heat distributing member is provided to a surface part of the closed top end.

4 . The vertical furnace according to claim 3 , wherein the surface part of the closed top end is an upper surface of the closed top end that faces an inner surface of the outer reaction tube.

5 . The vertical furnace according to claim 4 , wherein the heat distributing member is constructed and arranged to be receivable on the upper surface of the closed top end.

6 . The vertical furnace according to claim 3 , wherein the surface part of the top end is a lower surface of the closed top end that faces away from an inner surface of the outer reaction tube.

7 . A vertical furnace for processing a plurality of substrates, comprising:
a substrate carrier constructed and arranged to hold a plurality of substrates, an inner reaction tube extending in a longitudinal direction and constructed and arranged to receive the substrate carrier, the substrate carrier provided with a top plate, an outer reaction tube constructed and arranged around the inner reaction tube along the longitudinal direction, a heating element constructed and arranged around the outer reaction tube along the longitudinal direction,
wherein,
the substrate carrier comprises a heat distributing member provided to the top plate.

8 . The vertical furnace according to claim 7 , wherein the heat distributing member is releasably attached to the top plate.

9 . The vertical furnace according to claim 7 , wherein the substrate carrier comprises at least two rods, wherein each rod comprises a plurality of slots and wherein the substrate carrier comprises a further heat distributing member provided to the top most slot.

10 . The vertical furnace according to claim 7 , wherein the inner reaction tube is delimited by an open top end or by a closed top end.

11 . The vertical furnace according to claim 10 , wherein the inner reaction tube is delimited by the closed top end and wherein the heat distributing member is further comprised in the closed top end provided to a surface part of the closed top end.

12 . The vertical furnace according to claim 11 , wherein the surface part of the closed top end is an upper surface of the closed top end that faces an inner surface of the outer reaction tube or the surface part of the top end is a lower surface of the closed top end that faces away from the inner surface of the outer reaction tube.

13 . The vertical furnace according to claim 1 , wherein the heat distributing member is comprised of a thermally conducting material.

14 . The vertical furnace according to claim 13 , wherein the thermally conducting material comprises substantially at least one of silicon and silicon carbide.

15 . The vertical furnace according to claim 1 , wherein the outer reaction tube is delimited by a dome-shaped top end, wherein the dome-shaped top end comprises a coating.

16 . The vertical furnace according to claim 15 , wherein the coating is a reflective coating, thereby reducing heat loss from the dome-shaped top end during the processing.

17 . The vertical furnace according to claim 15 , wherein the coating is comprised on an inner surface of the dome-shaped top end that faces the top plate or is comprised on an outer surface of the dome-shaped top end, the outer surface being opposite to the inner surface.

18 . A method of processing a plurality of substrates, the method comprising:
providing a plurality of substrates in an inner reaction tube of a vertical furnace according to claim 1 and wherein the plurality of substrates is arranged in a substrate carrier, and providing a reaction gas mixture to the inner reaction tube, thereby forming a substrate film on each substrate of the plurality of substrates and an inner reaction tube film on one or more surfaces of the inner reaction tube.

19 . The method according to claim 18 , further comprising:
repeating the providing of the reaction gas mixture one or more times until the inner reaction tube film has reached a pre-determined thickness, and when the inner reaction tube film has reached the pre-determined thickness, exposing, in-situ, the one or more surfaces of the inner reaction tube to an ambient, thereby removing the inner reaction tube film.

20 . The method according to claim 18 , wherein the substrate film and the inner reaction tube film comprises an oxide or a nitride.

Assignees

• Asm Ip Holding Bv

Inventors

• Parui Subir
• Houben Kelly
• Oosterlaken Theodorus
• Terhorst Herbert
• Jongbloed Bert

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7621

  characterised by supporting two or more semiconductor substrates · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title