Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same
US-2025239471-A1 · Jul 24, 2025 · US
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Ozturk Ozkan patents
Ozturk Ozkan is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ozturk Ozkan |
| Total patents | 18 |
| First publication | Mar 26, 2020 |
| Latest publication | Jul 24, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same
US-12300522-B2 · May 13, 2025 · US
Planarization apparatus, planarization process, and method of manufacturing an article
US-12283522-B2 · Apr 22, 2025 · US
Planarization process, apparatus and method of manufacturing an article
US-12138747-B2 · Nov 12, 2024 · US
Planarization process, apparatus and method of manufacturing an article
US-2023373065-A1 · Nov 23, 2023 · US
Superstrate chuck, method of use, and method of manufacturing an article
US-11776840-B2 · Oct 3, 2023 · US
Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same
US-2023197463-A1 · Jun 22, 2023 · US
Planarization apparatus, planarization process, and method of manufacturing an article
US-2023061361-A1 · Mar 2, 2023 · US
Planarization apparatus, planarization process, and method of manufacturing an article
US-11562924-B2 · Jan 24, 2023 · US
Planarization apparatus, planarization process, and method of manufacturing an article
US-2021242073-A1 · Aug 5, 2021 · US
Recent patents
Latest publications not already listed above.
Planarization process, apparatus and method of manufacturing an article
US-11043407-B2 · Jun 22, 2021 · US
Planarization process, apparatus and method of manufacturing an article
US-11034057-B2 · Jun 15, 2021 · US
Superstrate and methods of using the same
US-11018018-B2 · May 25, 2021 · US
Superstrate chuck, method of use, and method of manufacturing an article
US-2021125855-A1 · Apr 29, 2021 · US
Planarization process, apparatus and method of manufacturing an article
US-2021050218-A1 · Feb 18, 2021 · US
Planarization process, apparatus and method of manufacturing an article
US-2021050246-A1 · Feb 18, 2021 · US
Superstrate and methods of using the same
US-2020185230-A1 · Jun 11, 2020 · US
Method of fluid droplet offset and apparatus for imprint lithography
US-2020096863-A1 · Mar 26, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Canon Kk | 18 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P95/06 | 13 |
| H10P72/0428 | 11 |
| G03F7/0002 | 11 |
| H10P95/08 | 10 |
| H01L21/31051 | 7 |