Vacuum chuck, substrate processing apparatus including the same and related method of manufacture
US-2021074574-A1 · Mar 11, 2021 · US
Superstrate chuck, method of use, and method of manufacturing an article
US2021125855A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021125855-A1 |
| Application number | US-201916667213-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 29, 2019 |
| Priority date | Oct 29, 2019 |
| Publication date | Apr 29, 2021 |
| Grant date | — |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
A chuck for retaining a superstrate or a template. The chuck comprises a geometric structure formed on a surface of the chuck. The geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced.
First claim
Opening claim text (preview).
What is claimed is: 1 . A light transmitting chuck for retaining a superstrate or a template, comprising a geometric structure formed on a surface of the chuck, wherein the geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced. 2 . The chuck of claim 1 , wherein the geometric structure includes a parallel surface portion parallel with the surface of the chuck and the roughened surface portion extending from the surface of the chuck to the parallel surface portion. 3 . The chuck of claim 1 , wherein the roughened edge portion includes a first roughened edge around the parallel surface portion and a second roughened edge around the surface of the chuck. 4 . The chuck of claim 1 , wherein the geometric structure comprises a plurality of lands extending from the surface to define a plurality of zones of the chuck. 5 . The chuck of claim 1 , wherein the geometric structure comprises at least a channel recessed from the surface of the chuck. 6 . The chuck of claim 1 , wherein the geometric structure comprises at least a port extending through the chuck. 7 . The chuck of claim 1 , wherein surface of the chuck is a support surface of the superstrate or the template. 8 . A method, comprising: retaining a superstrate or a template with a light transmitting chuck comprising a geometric structure, the geometric structure comprising at least one of a rounded edge portion and a roughened surface portion; advancing the superstrate or the template to be in contact with a formable material dispensed on a substrate; releasing the superstrate or the template from the chuck; and radiating light through the chuck and the superstrate or the template to cure the formable material, wherein an intensity variation of the light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced by at least one of the rounded corner and the roughened surface. 9 . The method of claim 8 , wherein the light includes UV light. 10 . The method of claim 8 , wherein the geometric structure includes a parallel surface portion parallel with a surface of the chuck and the roughened surface portion extending from the parallel surface portion to the surface of the chuck. 11 . The method of claim 10 , wherein the roughened edge portion includes a first roughened edge around the parallel surface portion and a second roughened edge around the surface of the chuck. 12 . The method of claim 8 , wherein the geometric structure includes a plurality of lands extending from a surface of the chuck. 13 . The method of claim 8 , wherein the geometric structure includes a channel recessed from a surface of the chuck. 14 . The method of claim 8 , wherein the geometric structure includes a port extending through the chuck. 15 . A method of manufacturing an article, comprising: dispensing a formable material on a substrate; retaining a superstrate with a light transmitting chuck, the chuck comprising a geometric structure, the geometric structure comprising at least one of a rounded edge portion and a roughened surface portion; advancing the superstrate to be in contact with the formable material dispensed on the substrate; releasing the superstrate from the chuck; and radiating light through the chuck and the superstrate or the template to cure the formable material, wherein an intensity variation of the light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced by at least one of the rounded corner and the roughened surface.
Assignees
Inventors
Classifications
- H10P72/7624Primary
characterised by the mechanical construction of the susceptor, stage or support · CPC title
characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title
Transparent · CPC title
using UV radiation · CPC title
with transparent parts, e.g. permitting visual inspection of the interior of the cavity · CPC title
Patent family
Related publications grouped by family.
External sources
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US2021125855A1 cover?
- A chuck for retaining a superstrate or a template. The chuck comprises a geometric structure formed on a surface of the chuck. The geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced.
- Who is the assignee on this patent?
- Canon Kk
- What technology area does this patent fall under?
- Primary CPC classification H10P72/7624. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Apr 29 2021 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).