Superstrate chuck, method of use, and method of manufacturing an article

Patent metadata

Field	Value
Publication number	US-11776840-B2
Application number	US-201916667213-A
Country	US
Kind code	B2
Filing date	Oct 29, 2019
Priority date	Oct 29, 2019
Publication date	Oct 3, 2023
Grant date	Oct 3, 2023

Abstract

A chuck for retaining a superstrate or a template. The chuck comprises a geometric structure formed on a surface of the chuck. The geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced.

First claim

What is claimed is:

1. A light transmitting chuck for retaining a superstrate or a template, the chuck comprising:
a chuck surface;
a channel recessed from the chuck surface, the channel including:
a channel surface parallel to the chuck surface;
a channel sidewall extending from the chuck surface to the channel surface;
a rounded edge between the chuck surface and the channel sidewall,
wherein the chuck surface transitions to the channel sidewall via the rounded edge of the channel; and

a land extending from the chuck surface, the land including:
a land surface parallel to the chuck surface;
a land sidewall extending from the land surface to the chuck surface; and
a rounded edge between the land surface and the sidewall,

wherein the land surface transitions to the land sidewall via the rounded edge of the land, and
wherein an intensity variation of light transmitting through the land and an area of the chuck adjacent to the land is reduced by the rounded edge of the land.

2. The chuck of claim 1 , wherein the land includes a roughened portion.

3. The chuck of claim 2 , wherein the roughened portion includes a first roughened edge around the land surface and a second roughened edge around the chuck surface.

4. The chuck of claim 1 , further comprising a plurality of other lands extending from the chuck surface, wherein the land and the plurality of other lands define a plurality of zones.

5. The chuck of claim 1 , further comprising at least a port extending through the chuck.

6. The chuck of claim 1 , wherein the chuck surface is a support surface of the superstrate or the template.

7. A method, comprising:
retaining a superstrate or a template with a light transmitting chuck, the chuck including:
a chuck surface;
a channel recessed from the chuck surface, the channel including:
a channel surface parallel to the chuck surface;
a channel sidewall extending from the chuck surface to the channel surface; and
a rounded edge between the chuck surface and the channel sidewall,
wherein the chuck surface transitions to the channel sidewall via the rounded edge of the channel; and

a land extending from the chuck surface, the land including:
a land surface parallel to the chuck surface;
a land sidewall extending from the land surface to the chuck surface; and
a rounded edge between the land surface and the land sidewall,
wherein the land surface transitions to the land sidewall via the rounded edge of the land;

advancing the superstrate or the template to be in contact with a formable material dispensed on a substrate;
releasing the superstrate or the template from the chuck; and
radiating light through the chuck and the superstrate or the template to cure the formable material, wherein an intensity variation of the light transmitting through the land and an area of the chuck adjacent to the land is reduced by the rounded edge of the land.

8. The method of claim 7 , wherein the light includes UV light.

9. The method of claim 7 , wherein the land includes a roughened portion.

10. The method of claim 9 , wherein the roughened portion includes a first roughened edge around the land surface and a second roughened edge around the chuck surface.

11. The method of claim 7 , wherein the chuck includes a plurality of other lands extending from the chuck surface.

12. The method of claim 7 , wherein the chuck includes a port extending through the chuck.

13. A method of manufacturing an article, comprising:
dispensing a formable material on a substrate;
retaining a superstrate with a light transmitting chuck, the chuck including:
a chuck surface;
a channel recessed from the chuck surface, the channel including:
a channel surface parallel to the chuck surface;
a channel sidewall extending from the chuck surface to the channel surface;
a rounded edge between the chuck surface and the channel sidewall,
wherein the chuck surface transitions to the channel sidewall via the rounded edge of the channel; and

a land extending from the chuck surface, the land including:
a land surface parallel to the chuck surface;
a land sidewall extending from the land surface to the chuck surface; and
a rounded edge between the land surface and the land sidewall,

wherein the land surface transitions to the land sidewall via the rounded edge of the land;

advancing the superstrate to be in contact with the formable material dispensed on the substrate;
releasing the superstrate from the chuck; and
radiating light through the chuck and the superstrate or the template to cure the formable material, wherein an intensity variation of the light transmitting through the land and an area of the chuck adjacent to the land is reduced by the rounded edge of the land.

Assignees

• Canon Kk

Inventors

• Roy Nilabh K
• Meissl Mario Johannes
• Bamesberger Seth J
• Ozturk Ozkan
• Choi Byung-Jin

Classifications

• H10P72/7624 Primary

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• H10P95/08

  Planarisation of organic insulating materials · CPC title

• H10P95/06

  Planarisation of inorganic insulating materials · CPC title

• H01L21/68785 Primary

  Electricity · mapped topic