Substrate cleaning method and substrate cleaning device
US-2025069907-A1 · Feb 27, 2025 · US
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Ohno Hiroki patents
Ohno Hiroki is listed as an inventor on 36 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ohno Hiroki |
| Total patents | 36 |
| First publication | Sep 17, 2015 |
| Latest publication | Feb 27, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate cleaning method and substrate cleaning device
US-12198947-B2 · Jan 14, 2025 · US
Substrate cleaning method and substrate cleaning device
US-2022367214-A1 · Nov 17, 2022 · US
Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus
US-10950465-B2 · Mar 16, 2021 · US
Substrate processing apparatus, substrate processing method, and storage medium
US-10923368-B2 · Feb 16, 2021 · US
Substrate processing apparatus
US-10692739-B2 · Jun 23, 2020 · US
Substrate processing apparatus, substrate processing method and recording medium
US-10651061-B2 · May 12, 2020 · US
Substrate processing apparatus, substrate processing method, and storage medium
US-10504718-B2 · Dec 10, 2019 · US
Substrate processing apparatus, substrate processing method, and recording medium
US-10395950-B2 · Aug 27, 2019 · US
Substrate processing apparatus, substrate processing method, and storage medium
US-2019148183-A1 · May 16, 2019 · US
Recent patents
Latest publications not already listed above.
Substrate processing apparatus, substrate processing method and recording medium
US-2019122905-A1 · Apr 25, 2019 · US
Substrate processing apparatus, substrate processing method and recording medium
US-2019096710-A1 · Mar 28, 2019 · US
Substrate processing apparatus and substrate processing method
US-2019096711-A1 · Mar 28, 2019 · US
High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container
US-10207349-B2 · Feb 19, 2019 · US
Substrate processing method, substrate processing apparatus, and storage medium
US-10199240-B2 · Feb 5, 2019 · US
Separation and regeneration apparatus and substrate processing apparatus
US-10115609-B2 · Oct 30, 2018 · US
Substrate processing method and storage medium
US-10096462-B2 · Oct 9, 2018 · US
Substrate processing apparatus
US-2018254200-A1 · Sep 6, 2018 · US
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium
US-10046370-B2 · Aug 14, 2018 · US
Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus
US-2018158699-A1 · Jun 7, 2018 · US
Substrate processing apparatus, substrate processing method, and storage medium
US-2018138035-A1 · May 17, 2018 · US
Substrate processing apparatus, substrate processing method, and storage medium
US-2018138058-A1 · May 17, 2018 · US
Substrate processing apparatus, substrate processing method, and recording medium
US-2018130675-A1 · May 10, 2018 · US
Substrate processing method, substrate processing apparatus, and storage medium
US-9881784-B2 · Jan 30, 2018 · US
Rotary valve and quick exhaust valve for railway vehicle
US-2017321814-A1 · Nov 9, 2017 · US
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium
US-2017320107-A1 · Nov 9, 2017 · US
Cross hole deburring tool, cross hole deburring method, and rotary valve machined by using the same
US-2017282258-A1 · Oct 5, 2017 · US
Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium
US-9662685-B2 · May 30, 2017 · US
Supercritical drying method for semiconductor substrate and supercritical drying apparatus
US-9583330-B2 · Feb 28, 2017 · US
Substrate processing method, substrate processing apparatus, and storage medium
US-2017011907-A1 · Jan 12, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 32 |
| Kitz Corp | 4 |
| Toshiba Memory Corp | 2 |
| Hayashi Hidekazu | 1 |
| Sato Yohei | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P70/80 | 19 |
| H10P70/20 | 18 |
| H10P72/0414 | 16 |
| H01L21/67051 | 16 |
| H10P72/0402 | 14 |