Plasma processing method
US-11450512-B2 · Sep 20, 2022 · US
This page is not indexed by search engines while we improve data quality.
Noro Naotaka patents
Noro Naotaka is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Noro Naotaka |
| Total patents | 18 |
| First publication | Jun 25, 2015 |
| Latest publication | Sep 20, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Film forming apparatus
US-11377739-B2 · Jul 5, 2022 · US
Film forming apparatus, cleaning method for film forming apparatus and recording medium
US-11081322-B2 · Aug 3, 2021 · US
Plasma Processing Method
US-2021142982-A1 · May 13, 2021 · US
Film forming method
US-10872764-B2 · Dec 22, 2020 · US
Film-forming method and film-forming apparatus
US-10811264-B2 · Oct 20, 2020 · US
Film Forming Apparatus
US-2020056285-A1 · Feb 20, 2020 · US
Method of forming titanium oxide film and method of forming hard mask
US-10535528-B2 · Jan 14, 2020 · US
Film forming apparatus
US-10519548-B2 · Dec 31, 2019 · US
Film forming method, film forming system and surface processing method
US-10392698-B2 · Aug 27, 2019 · US
Recent patents
Latest publications not already listed above.
Film forming method
US-2019088475-A1 · Mar 21, 2019 · US
Film-Forming Method and Film-Forming Apparatus
US-2019067015-A1 · Feb 28, 2019 · US
Method of forming titanium oxide film and method of forming hard mask
US-2018108534-A1 · Apr 19, 2018 · US
Film forming apparatus, cleaning method for film forming apparatus and recording medium
US-2018108518-A1 · Apr 19, 2018 · US
Analysis method for silanol group of substrate surface
US-2018047647-A1 · Feb 15, 2018 · US
Film forming method, film forming system and surface processing method
US-2018037989-A1 · Feb 8, 2018 · US
Film Forming Apparatus
US-2017088950-A1 · Mar 30, 2017 · US
Substrate processing apparatus and substrate processing method
US-2015179408-A1 · Jun 25, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 18 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6339 | 14 |
| H10P14/69394 | 8 |
| H10P14/43 | 8 |
| C23C16/45525 | 7 |
| H10P14/668 | 6 |