Substrate processing apparatus and substrate processing method
US-12404587-B2 · Sep 2, 2025 · US
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Niwa Takafumi patents
Niwa Takafumi is listed as an inventor on 20 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Niwa Takafumi |
| Total patents | 20 |
| First publication | Apr 7, 2016 |
| Latest publication | Sep 2, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate treatment method and substrate treatment apparatus
US-2024248413-A1 · Jul 25, 2024 · US
Substrate processing method, substrate processing apparatus, and recording medium
US-2024200195-A1 · Jun 20, 2024 · US
Steam turbine plant and method for cleaning same
US-11873723-B2 · Jan 16, 2024 · US
Steam turbine plant and method for cleaning same
US-2023313703-A1 · Oct 5, 2023 · US
Substrate processing apparatus and substrate processing method
US-2023098105-A1 · Mar 30, 2023 · US
Substrate processing method and substrate processing apparatus
US-2023085449-A1 · Mar 16, 2023 · US
Substrate liquid processing method, substrate liquid processing apparatus, and computer-readable recording medium
US-2022290302-A1 · Sep 15, 2022 · US
Substrate processing method and substrate processing apparatus
US-2022251709-A1 · Aug 11, 2022 · US
Substrate liquid processing apparatus and substrate liquid processing method
US-2021317581-A1 · Oct 14, 2021 · US
Recent patents
Latest publications not already listed above.
Coating film forming method, coating film forming apparatus, and storage medium
US-10672606-B2 · Jun 2, 2020 · US
Auxiliary exposure apparatus and exposure amount distribution acquisition method
US-10642168-B2 · May 5, 2020 · US
Coating Film Forming Method, Coating Film Forming Apparatus, and Storage Medium
US-2018350594-A1 · Dec 6, 2018 · US
Coating film forming method, coating film forming apparatus, and storage medium
US-10068763-B2 · Sep 4, 2018 · US
Liquid processing method, memory medium and liquid processing apparatus
US-9972512-B2 · May 15, 2018 · US
Auxiliary exposure apparatus and exposure amount distribution acquisition method
US-2018095370-A1 · Apr 5, 2018 · US
Liquid processing method, memory medium and liquid processing apparatus
US-2018019112-A1 · Jan 18, 2018 · US
Liquid processing method, memory medium and liquid processing apparatus
US-9786488-B2 · Oct 10, 2017 · US
Coating film forming method, coating film forming apparatus, and storage medium
US-2017140929-A1 · May 18, 2017 · US
Liquid processing method, memory medium and liquid processing apparatus
US-2016096203-A1 · Apr 7, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 18 |
| Mitsubishi Heavy Ind Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/168 | 7 |
| H10P76/00 | 6 |
| H10P72/0604 | 6 |
| C23C18/1628 | 6 |
| H10P76/4085 | 5 |