Coating film forming method, coating film forming apparatus, and storage medium

Patent metadata

Field	Value
Publication number	US-10068763-B2
Application number	US-201615350150-A
Country	US
Kind code	B2
Filing date	Nov 14, 2016
Priority date	Nov 16, 2015
Publication date	Sep 4, 2018
Grant date	Sep 4, 2018

Abstract

A method of forming a coating film includes horizontally supporting a substrate, supplying a coating solution to a central portion of the substrate and spreading the coating solution by a centrifugal force by rotating the substrate at a first rotational speed, decreasing a speed of the substrate from the first rotational speed toward a second rotational speed and rotating the substrate at the second rotational speed to make a surface of a liquid film of the coating solution even, supplying a gas to a surface of the substrate when the substrate is rotated at the second rotational speed to reduce fluidity of the coating solution, and drying the surface of the substrate by rotating the substrate at a third rotational speed faster than the second rotational speed.

First claim

What is claimed is:

1. A method of forming a coating film, comprising:
horizontally supporting a substrate in a rotatable substrate support part around a vertical axis;
supplying a coating solution to a central portion of the substrate and spreading the coating solution by a centrifugal force by rotating the substrate at a first rotational speed;
subsequently, decreasing a speed of the substrate from the first rotational speed toward a second rotational speed and rotating the substrate at the second rotational speed to make a surface of a liquid film of the coating solution even;
supplying a gas to a surface of the substrate by a gas nozzle while repeatedly reciprocating the gas nozzle between a first position and a second position, when the substrate is rotated at the second rotational speed to reduce fluidity of the coating solution; and
after that, drying the surface of the substrate by rotating the substrate at a third rotational speed faster than the second rotational speed,
wherein the first position is located at an outer edge of the substrate, and the second position is located at a predetermined distance from a center of the substrate and is closer to the center of the substrate than the first position.

2. The method of claim 1 , wherein the drying the surface of the substrate by rotating the substrate at a third rotational speed comprises setting an annular member formed annularly along a circumferential direction of the substrate at a position to cover an upper side of a peripheral portion of the substrate, and flow-rectifying an air current above the peripheral portion of the substrate by the annular member.

3. The method of claim 1 , wherein the second rotational speed is 1000 rpm or lower.

4. The method of claim 1 , wherein the third rotational speed is 1800 rpm or higher.

5. The method of claim 1 , wherein a position near the center of the substrate closest to a region to which the gas is supplied on the surface of the substrate is a position ranging from 50 mm to 120 mm in a peripheral direction from the center of the substrate.

6. The method of claim 1 , wherein, in the supplying a gas to a surface of the substrate, a heated gas is supplied.

Assignees

• Tokyo Electron Ltd

Inventors

• Yoshihara Kousuke
• Niwa Takafumi

Classifications

• H10P72/0434

  mainly by convection · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/0406

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title