Methods and systems for delivery of vanadium compounds

Patent metadata

Field	Value
Publication number	US-12351902-B2
Application number	US-202117316847-A
Country	US
Kind code	B2
Filing date	May 11, 2021
Priority date	May 11, 2020
Publication date	Jul 8, 2025
Grant date	Jul 8, 2025

Abstract

A method may comprise disposing vanadium tetrachloride in a delivery vessel; delivering the vanadium tetrachloride to a reaction chamber in fluid communication with the delivery vessel; mitigating the delivery of decomposition products of the vanadium tetrachloride to the reaction chamber; and/or applying the vanadium tetrachloride to a substrate disposed in the reaction chamber to form a layer comprising vanadium on the substrate.

First claim

The invention claimed is:

1. A method, comprising:
delivering vanadium tetrachloride from a bulk supply tank to a delivery vessel as a gas;
after delivering vanadium tetrachloride to the delivery vessel, adding excess chlorine gas to the delivery vessel, thereby mitigating the decomposition of vanadium tetrachloride into decomposition products of the vanadium tetrachloride;
periodically delivering the vanadium tetrachloride from the delivery vessel to a reaction chamber configured for depositing a material and in fluid communication with the delivery vessel; and
sequentially applying the vanadium tetrachloride and a reactant to a substrate disposed in the reaction chamber to form a layer comprising vanadium on the substrate by a cyclical deposition process.

2. The method of claim 1 , further comprising opening a bleed valve connected to the delivery vessel when a pressure in the delivery vessel reaches a certain pressure level, wherein the bleed valve is closed when a pressure in the delivery vessel is below the certain pressure level.

3. The method of claim 1 , further comprising periodically transferring the vanadium tetrachloride and the chlorine gas from within the delivery vessel to a disposal tank; and, after transferring the vanadium tetrachloride and the chlorine gas to the disposal tank, delivering fresh vanadium tetrachloride into the delivery vessel,
wherein periodically delivering the vanadium tetrachloride to the reaction chamber occurs after delivering the fresh vanadium tetrachloride to the delivery vessel.

4. The method of claim 3 , wherein the delivery vessel comprises a bottom recessed area, wherein a tip of a dip tube is disposed within the bottom recessed area, and wherein the vanadium tetrachloride and the chlorine gas are transferred to the disposal tank through the dip tube.

5. The method of claim 3 , wherein the fresh vanadium tetrachloride is disposed into the delivery vessel from the bulk supply tank in fluid communication with the delivery vessel.

6. The method of claim 5 , further comprising mitigating decomposition of the fresh vanadium tetrachloride within the bulk supply tank.

7. The method of claim 6 , wherein the mitigating decomposition of the fresh vanadium tetrachloride within the bulk supply tank comprises supplying excess chlorine gas to the bulk supply tank.

8. The method of claim 6 , wherein the mitigating decomposition of the fresh vanadium tetrachloride within the bulk supply tank comprises removing the chlorine gas from the bulk supply tank.

9. The method of claim 8 , wherein the removing the chlorine gas from the bulk supply tank further comprises removing solubilized chlorine gas comprised in a composition comprising the fresh vanadium tetrachloride from the bulk supply tank.

10. The method of claim 1 , further comprising removing the chlorine gas from the delivery vessel.

11. The method of claim 10 , wherein the removing the chlorine gas from the delivery vessel further comprises removing solubilized chlorine gas comprised in a composition comprising the vanadium tetrachloride from the delivery vessel.

12. The method of claim 1 , further comprising:
monitoring a pressure within the delivery vessel; and
venting, through a vent valve of the delivery vessel, one or more of the decomposition products out of the delivery vessel in response to the pressure exceeding a pressure threshold level.

13. The method of claim 1 , further comprising periodically venting, through a vent valve of the delivery vessel, one or more of the decomposition products out of the delivery vessel based on a timed venting schedule.

14. The method of claim 1 , wherein the delivering the vanadium tetrachloride to the reaction chamber comprises flowing a composition comprising the vanadium tetrachloride through a filter that removes chlorine gas comprised in the composition.

15. The method of claim 6 , further comprising:
monitoring a pressure within the bulk supply tank, wherein the mitigating decomposition of the fresh vanadium tetrachloride within the bulk supply tank comprises venting, through a vent valve of the bulk supply tank, one or more of the decomposition products out of the bulk supply tank in response to the pressure reaching or exceeding a pressure threshold level.

16. The method of claim 6 , wherein the mitigating decomposition of the fresh vanadium tetrachloride within the bulk supply tank comprises periodically venting, through a vent valve of the bulk supply tank, one or more of the decomposition products out of the bulk supply tank based on a timed venting schedule.

Assignees

• Asm Ip Holding Bv

Inventors

• Dezelah Charles
• Xie Qi
• Raisanen Petri
• Pierreux Dieter
• Jongbloed Bert
• Knaepen Werner
• Shero Eric James

Classifications

• C23C16/45557

  Pulsed pressure or control pressure · CPC title

• C23C16/4402 Primary

  Reduction of impurities in the source gas · CPC title

• C23C16/45553 Primary

  characterized by the use of precursors specially adapted for ALD · CPC title

• C23C16/14

  Deposition of only one other metal element · CPC title

• C23C16/452

  by activating reactive gas streams before {their} introduction into the reaction chamber, e.g. by {ionisation} or addition of reactive species · CPC title