Reactor manifolds
US-2026085416-A1 · Mar 26, 2026 · US
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Shero Eric James patents
Shero Eric James is listed as an inventor on 158 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Shero Eric James |
| Total patents | 158 |
| First publication | Jan 5, 2016 |
| Latest publication | Mar 26, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Low temperature flowable vanadium oxide gap fill
US-12571095-B2 · Mar 10, 2026 · US
Method of forming structures including a vanadium or indium layer
US-12563983-B2 · Feb 24, 2026 · US
Method, system and apparatus for forming an oxide layer
US-2026047363-A1 · Feb 12, 2026 · US
Apparatus for providing a gas mixture to a reaction chamber and method of using same
US-2026043134-A1 · Feb 12, 2026 · US
Methods and apparatus for cleaning a vessel
US-2026042130-A1 · Feb 12, 2026 · US
Method of depositing vanadium metal
US-12545999-B2 · Feb 10, 2026 · US
Precursor delivery system and method therefor
US-12546006-B2 · Feb 10, 2026 · US
Showerhead assembly and components
US-2026035793-A1 · Feb 5, 2026 · US
Solid source sublimator
US-12540391-B2 · Feb 3, 2026 · US
Recent patents
Latest publications not already listed above.
Multiple temperature reactor system and method
US-2026022467-A1 · Jan 22, 2026 · US
Semiconductor processing device
US-2026009127-A1 · Jan 8, 2026 · US
Reactor manifolds
US-12516414-B2 · Jan 6, 2026 · US
Methods for forming a doped high-k layer on a substrate
US-2026005017-A1 · Jan 1, 2026 · US
Method for forming a semiconductor structure, method for depositing a dipole layer on a substrate, and associated methods for forming a gate structure for a semiconductor device
US-2025369110-A1 · Dec 4, 2025 · US
Manifolds for uniform vapor deposition
US-2025361611-A1 · Nov 27, 2025 · US
Methods and systems for filling a gap
US-2025357199-A1 · Nov 20, 2025 · US
Apparatus for providing a gas mixture to a reaction chamber and method of using same
US-12473641-B2 · Nov 18, 2025 · US
Methods and apparatus for cleaning a vessel
US-12472539-B2 · Nov 18, 2025 · US
Semiconductor processing device
US-12467137-B2 · Nov 11, 2025 · US
Showerhead assembly and components
US-12467140-B2 · Nov 11, 2025 · US
Multiple-layer method and system for forming material within a gap
US-12463094-B2 · Nov 4, 2025 · US
Manifolds for uniform vapor deposition
US-12416081-B2 · Sep 16, 2025 · US
Apparatus and method for providing a pulse of a precursor
US-2025277308-A1 · Sep 4, 2025 · US
Vapor deposition of films comprising molybdenum
US-2025279279-A1 · Sep 4, 2025 · US
Methods and systems for filling a gap
US-12406881-B2 · Sep 2, 2025 · US
Substrate susceptor using edge purging
US-12406871-B2 · Sep 2, 2025 · US
STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
US-2025239444-A1 · Jul 24, 2025 · US
Substrate lift assembly, system including the assembly, and methods of using same
US-2025233007-A1 · Jul 17, 2025 · US
Methods and systems for forming a layer comprising aluminum, titanium, and carbon
US-12362171-B2 · Jul 15, 2025 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asm Ip Holding Bv | 159 |
| Asm Ip Holdings B V | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45544 | 71 |
| C23C16/45553 | 59 |
| H10P14/6339 | 47 |
| C23C16/45561 | 43 |
| C23C16/52 | 43 |