Process chamber volume adjustment
US-12546008-B2 · Feb 10, 2026 · US
This page is not indexed by search engines while we improve data quality.
Fondurulia Kyle patents
Fondurulia Kyle is listed as an inventor on 51 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Fondurulia Kyle |
| Total patents | 51 |
| First publication | Aug 27, 2015 |
| Latest publication | Feb 10, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Showerhead assembly and components
US-2026035793-A1 · Feb 5, 2026 · US
Solid source sublimator
US-12540391-B2 · Feb 3, 2026 · US
Methods and apparatus for gas distribution
US-2025391672-A1 · Dec 25, 2025 · US
Methods and apparatus for thermal uniformity
US-2025369119-A1 · Dec 4, 2025 · US
Showerhead assembly and components
US-12467140-B2 · Nov 11, 2025 · US
Apparatus and method for providing a pulse of a precursor
US-2025277308-A1 · Sep 4, 2025 · US
Methods and apparatus for insulating gas lines
US-2025207715-A1 · Jun 26, 2025 · US
Heater assembly including cooling apparatus and method of using same
US-2025171898-A1 · May 29, 2025 · US
Heater assembly including cooling apparatus and method of using same
US-12247286-B2 · Mar 11, 2025 · US
Recent patents
Latest publications not already listed above.
Temperature-controlled chemical delivery system and reactor system including same
US-12163225-B2 · Dec 10, 2024 · US
Weighted lift pin constructions for semiconductor fabrication processing
US-2024249971-A1 · Jul 25, 2024 · US
Process chamber volume adjustment
US-2024218514-A1 · Jul 4, 2024 · US
Reactant vaporizer and related systems and methods
US-2024209501-A1 · Jun 27, 2024 · US
Systems and apparatus for semiconductor equipment
US-2024167160-A1 · May 23, 2024 · US
Gas supply assembly, components thereof, and reactor system including same
US-11976359-B2 · May 7, 2024 · US
Reactant vaporizer and related systems and methods
US-11926894-B2 · Mar 12, 2024 · US
Solid source sublimator
US-2023383402-A1 · Nov 30, 2023 · US
Solid source sublimator
US-2023313370-A1 · Oct 5, 2023 · US
Methods and apparatus for chamber lid cooling
US-2023313367-A1 · Oct 5, 2023 · US
Solid source sublimator
US-11773486-B2 · Oct 3, 2023 · US
Heating zone separation for reactant evaporation system
US-2023235454-A1 · Jul 27, 2023 · US
Solid source sublimator
US-2023183861-A1 · Jun 15, 2023 · US
Semiconductor processing device with heater
US-2023183863-A1 · Jun 15, 2023 · US
Solid source sublimator
US-11634812-B2 · Apr 25, 2023 · US
Heating zone separation for reactant evaporation system
US-11624113-B2 · Apr 11, 2023 · US
Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
US-11626313-B2 · Apr 11, 2023 · US
Semiconductor reaction chamber showerhead
US-11501956-B2 · Nov 15, 2022 · US
Reactant vaporizer and related systems and methods
US-11377732-B2 · Jul 5, 2022 · US
Showerhead assembly and components
US-2021214846-A1 · Jul 15, 2021 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asm Ip Holding Bv | 52 |
| Asm Ip Holdings B V | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45544 | 30 |
| C23C16/448 | 26 |
| C23C16/45565 | 21 |
| H10P72/0402 | 18 |
| C23C16/45561 | 15 |