Gas supply assembly, components thereof, and reactor system including same

Patent metadata

Field	Value
Publication number	US-11976359-B2
Application number	US-202017136659-A
Country	US
Kind code	B2
Filing date	Dec 29, 2020
Priority date	Jan 6, 2020
Publication date	May 7, 2024
Grant date	May 7, 2024

Abstract

Gas supply assemblies and reactors systems including the gas supply assemblies are disclosed. An exemplary gas supply assembly includes a vessel, a valve plate, a housing encasing the vessel and the valve plate, a gas feedthrough having a first end interior of the housing and a second end exterior of the housing, and one or more valves attached to the valve plate, wherein at least one valve is fluidly coupled to an interior of the vessel. The assemblies can further include a removable gas line having a first end coupled to the at least one valve and a second end coupled to the gas feedthrough. Additionally or alternatively, a gas supply assembly can include one or more valve plate leveling devices coupled to the valve plate.

First claim

What is claimed is:

1. A gas supply assembly comprising:
a vessel;
a valve plate;
a valve plate leveling device coupled to the valve plate and comprising a set pin;
a housing encasing the vessel and the valve plate;
a gas feedthrough having a first end interior of the housing and a second end exterior of the housing;
one or more valves attached to the valve plate, wherein at least one valve is fluidly coupled to an interior of the vessel; and
a removable gas line comprising:
a first end directly coupled to the least one valve with a first sealing member, and comprising a first recessed area on a first surface of the first end;
a second end directly coupled to the gas feedthrough with a second sealing member, and comprising a second recessed area on a second surface of the second end;
a first conduit coupled to the first end;
a second conduit disposed between the first conduit and the second end, wherein the second conduit is perpendicular to the first conduit;
wherein the first and second conduits form a singular, non-bifurcated flow path.

2. The gas supply assembly of claim 1 , further comprising a lid between the vessel and the valve plate.

3. The gas supply assembly of claim 1 , wherein the vessel retains a solid precursor.

4. The gas supply assembly of claim 3 , wherein a capacity of the vessel is greater than 500 g, or between 500 g and 2 kg, or between 500 g and 1.75 kg, or between 750 g and 1.5 kg.

5. The gas supply assembly of claim 1 , wherein the vessel retains a liquid precursor.

6. The gas supply assembly of claim 5 , wherein a capacity of the vessel is greater than 0.5 L, or between 0.5 L and 2 L, or between 0.75 L and 2 L, or between 0.75 L and 1.5 L.

7. The gas supply assembly of claim 1 , further comprising a drip pan and a stop attached to the drip pan.

8. The gas supply assembly of claim 1 , further comprising a coupler connecting the first conduit to the second conduit.

9. The gas supply assembly of claim 1 , further comprising a gas line cover overlying at least a portion of the removable gas line.

10. The gas supply assembly of claim 1 , wherein the gas feedthrough comprises a casing.

11. The gas supply assembly of claim 10 , wherein the gas feedthrough further comprises a heater embedded in the casing.

12. A gas supply assembly comprising:
a vessel;
a valve plate;
a housing encasing the vessel and the valve plate;
a gas feedthrough having a first end interior of the housing and a second end exterior of the housing;
a plurality of valves attached to the valve plate, wherein at least one valve of the plurality of valves is fluidly coupled to an interior of the vessel; and
one or more valve plate leveling devices coupled to the valve plate, wherein at least one of the one or more valve plate leveling devices comprises a set pin.

13. The gas supply assembly of claim 12 , further comprising a removable gas line having a first end coupled to the at least one valve and a second end coupled to the gas feedthrough.

14. The gas supply assembly of claim 12 , further comprising a heater plate beneath the vessel.

15. The gas supply assembly of claim 14 , further comprising one or more heater leveling devices coupled to the heater plate.

Assignees

• Asm Ip Holding Bv

Inventors

• Huang Jianqiu
• Zhao Gejian
• Fondurulia Kyle

Classifications

• C23C16/45561 Primary

  Gas plumbing upstream of the reaction chamber · CPC title

• F15B13/0817

  Multiblock manifolds · CPC title

• F16K7/14

  arranged to be deformed against a flat seat · CPC title

• F16K27/003

  Housing formed from a plurality of the same valve elements · CPC title

• F17C13/04

  Arrangement or mounting of valves (valves per se F16K {; snap-coupling of nipples F16L37/00}) · CPC title