Solid source sublimator

Patent metadata

Field	Value
Publication number	US-11773486-B2
Application number	US-202318163144-A
Country	US
Kind code	B2
Filing date	Feb 1, 2023
Priority date	Aug 16, 2018
Publication date	Oct 3, 2023
Grant date	Oct 3, 2023

Abstract

Herein disclosed are systems and methods related to solid source chemical sublimator vessels and corresponding deposition modules. The solid source chemical sublimator can include a housing configured to hold solid chemical reactant therein. A lid may be disposed on a proximal portion of the housing. The lid can include a fluid inlet and a fluid outlet and define a serpentine flow path within a distal portion of the lid. The lid can be adapted to allow gas flow within the flow path. The solid source chemical sublimator can include a filter that is disposed between the serpentine flow path and the distal portion of the housing. The filter can have a porosity configured to restrict a passage of a solid chemical reactant therethrough.

First claim

What is claimed is:

1. A solid source chemical sublimator, comprising:
a housing comprising a proximal portion and a distal portion, the housing having a housing axis extending along a length of the housing, the distal portion configured to hold solid chemical reactant therein;
a lid disposed on the proximal portion of the housing, the lid comprising a fluid inlet and a fluid outlet, the housing axis being perpendicular to a plane of the lid;
a thermally conductive conduit disposed along the housing axis;
two or more thermally conductive protrusions extending radially from the conductive conduit, wherein the conductive protrusions are connected to the conductive conduit and wherein the distal portion of the housing is configured to hold the solid chemical reactant with the conductive protrusions positioned therein; and
a flow structure configured to increase a length of time of carrier gas exposure to sublimed reactant, the flow structure disposed within a proximal interior portion of the housing and comprising a plurality of protrusions axially spaced from one another, the plurality of protrusions forming one or more fluid paths between the fluid inlet to the fluid outlet.

2. The solid source chemical sublimator of claim 1 , wherein at least two of the two or more thermally conductive protrusions are spaced radially from the housing axis.

3. The solid source chemical sublimator of claim 1 , wherein the two or more conductive protrusions comprises at least six conductive protrusions.

4. The solid source chemical sublimator of claim 1 , wherein the conductive conduit is configured to be connected to a heat source.

5. The solid source chemical sublimator of claim 1 , further comprising a filter disposed below a distal face of the lid and above the proximal portion of the housing, the filter having a porosity configured to restrict a passage of the solid chemical reactant therethrough.

6. The solid source chemical sublimator of claim 5 , wherein the distal face of the lid contacts a proximal surface of the filter, and wherein the proximal portion of the housing contacts a distal surface of the filter.

7. The solid source chemical sublimator of claim 5 , wherein the flow structure comprises a filter frame configured to support the filter.

8. The solid source chemical sublimator of claim 1 , wherein the flow structure comprises a serpentine path configured to promote saturation of the carrier gas with the sublimed reactant.

9. A solid source chemical sublimator, comprising:
a housing defining a housing axis extending along a length of the housing, the housing configured to hold solid chemical reactant therein;
a base disposed at a distal end of the housing;
a lid disposed at a proximal end of the housing, the housing axis being perpendicular to a face of the lid and to a face of the base;
a thermally conductive conduit extending from the base along the housing axis;
a plurality of thermally conductive protrusions extending from the thermally conductive conduit, each of the plurality of thermally conductive protrusions configured to heat the solid chemical reactant; and
a filter disposed at least partially between the lid and the housing, the filter having a porosity configured to restrict a passage of the solid chemical reactant therethrough.

10. The solid source chemical sublimator of claim 9 , wherein at least one of the plurality of thermally conductive protrusions is connected to the base.

11. The solid source chemical sublimator of claim 9 , wherein at least one of the plurality of thermally conductive protrusions extends from the base.

12. The solid source chemical sublimator of claim 11 , wherein the at least one thermally conductive protrusion extends axially from the base.

13. The solid source chemical sublimator of claim 9 , wherein at least two of the plurality of thermally conductive protrusions are spaced radially in relation to the housing axis.

14. The solid source chemical sublimator of claim 13 , wherein the at least two of the plurality of thermally conductive protrusions extend orthogonal to the housing axis.

15. A solid source vessel comprising:
a housing configured to hold solid chemical reactant within an interior volume of the housing;
a flow structure disposed within a proximal portion of the interior volume of the housing, the flow structure configured to promote saturation of a carrier gas with sublimed reactant;
a refill aperture configured to allow delivery of the solid chemical reactant into the interior volume of the housing; and
a plurality of thermally conductive protrusions extending within the interior volume of the housing, each of the plurality of thermally conductive protrusions configured to heat the solid chemical reactant.

16. The solid source vessel of claim 15 , wherein the plurality of thermally conductive protrusions comprises a vertical protrusion and a radial protrusion extending radially outward from the vertical protrusion.

17. The solid source vessel of claim 16 , wherein the radial protrusion is cantilevered from the vertical protrusion such that the radial protrusion does not contact the housing.

18. The solid source vessel of claim 16 , further comprising a heating element disposed within the vertical protrusion.

19. The solid source vessel of claim 15 , wherein each of the plurality of thermally conductive protrusions have an elongate shape.

20. The solid source vessel of claim 15 , wherein each set of adjacent of the plurality of thermally conductive protrusions are spaced radially equally from each other set.

Assignees

• Asm Ip Holding Bv

Inventors

• Shero Eric James
• White Carl Louis
• Verghese Mohith E
• Fondurulia Kyle
• Sullivan Timothy James

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/0431

  Apparatus for thermal treatment · CPC title

• C23C16/4485 Primary

  by evaporation without using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title

• H01L21/67098

  Electricity · mapped topic