Solid source sublimator

Patent metadata

Field	Value
Publication number	US-11634812-B2
Application number	US-201916539911-A
Country	US
Kind code	B2
Filing date	Aug 13, 2019
Priority date	Aug 16, 2018
Publication date	Apr 25, 2023
Grant date	Apr 25, 2023

Abstract

Herein disclosed are systems and methods related to solid source chemical sublimator vessels and corresponding deposition modules. The solid source chemical sublimator can include a housing configured to hold solid chemical reactant therein. A lid may be disposed on a proximal portion of the housing. The lid can include a fluid inlet and a fluid outlet and define a serpentine flow path within a distal portion of the lid. The lid can be adapted to allow gas flow within the flow path. The solid source chemical sublimator can include a filter that is disposed between the serpentine flow path and the distal portion of the housing. The filter can have a porosity configured to restrict a passage of a solid chemical reactant therethrough.

First claim

What is claimed is:

1. A solid source chemical sublimator, comprising:
a housing comprising a proximal portion and a distal portion, the housing having a housing axis extending along a length of the housing, the distal portion configured to hold solid chemical reactant therein;
a lid disposed on the proximal portion of the housing, the lid comprising a fluid inlet and a fluid outlet, the lid defining a serpentine flow path within a distal face of the lid, wherein the lid is adapted to allow gas flow within the flow path, the housing axis being perpendicular to a plane of the lid; and
a filter disposed below the serpentine flow path and above the proximal portion of the housing, the filter having a porosity configured to restrict a passage of the solid chemical reactant therethrough.

2. The solid source chemical sublimator of claim 1 , wherein the distal portion comprises:
a thermally conductive conduit disposed along the housing axis; and
two or more thermally conductive protrusions, wherein the conductive protrusions are in thermal communication with the conductive conduit and disposed radially around the conductive conduit, whereby the distal portion of the housing is configured to hold the solid chemical reactant with the conductive protrusions positioned therebetween,
wherein the conductive conduit is configured to be placed in conductive thermal communication with a heat source.

3. The solid source chemical sublimator of claim 2 , the two or more conductive protrusions comprising at least six conductive protrusions.

4. The solid source chemical sublimator of claim 2 , wherein the two or more conductive protrusions are in thermal communication with the distal portion of the housing.

5. The solid source chemical sublimator of claim 4 , wherein the one or more heating elements comprise a heating plate disposed in thermal contact with the housing.

6. The solid source chemical sublimator of claim 2 , wherein the two or more conductive protrusions extend from the distal portion of the housing.

7. The solid source chemical sublimator of claim 6 , wherein the two or more conductive protrusions are spaced radially from the housing axis.

8. The solid source chemical sublimator of claim 6 , wherein the two or more conductive protrusions extend axially from the distal portion of the housing.

9. The solid source chemical sublimator of claim 1 , wherein the housing is cylindrical and the filter is circular.

10. The solid source chemical sublimator of claim 1 , wherein the filter comprises an inlet in communication with the fluid inlet of the lid, the inlet of the filter configured to allow the solid chemical reactant to pass therethrough into the housing.

11. The solid source chemical sublimator of claim 1 , wherein the distal face of the lid contacts a proximal surface of the filter, and wherein the proximal portion of the housing contacts a distal surface of the filter.

12. The solid source chemical sublimator of claim 1 , wherein the filter comprises at least one of a ceramic or a metal.

13. The solid source chemical sublimator of claim 1 , wherein the filter comprises a disk having an aspect ratio of a thickness to a diameter of between about 25 and 1000.

14. The solid source chemical sublimator of claim 1 , wherein the fluid inlet and the fluid outlet are each in fluid communication with the flow path.

15. The solid source chemical sublimator of claim 1 , wherein the inlet, the outlet, or both, comprises a corresponding valve configured to allow fluid to flow therethrough.

16. The solid source chemical sublimator of claim 1 , wherein the inlet, the outlet, or both, comprises a corresponding filter configured to restrict particulate flow therethrough.

17. The solid source chemical sublimator of claim 1 , wherein the distal face is circular and adjacent to a proximal surface of the filter.

18. The solid source chemical sublimator of claim 1 , wherein the flow path comprises a plurality of antiparallel segments within a plane.

19. The solid source chemical sublimator of claim 1 , wherein the filter is disposed between the fluid outlet and the distal portion of the housing.

20. A solid source chemical sublimator, comprising:
a housing comprising a proximal portion and a distal portion, the housing having a housing axis extending along a length of the housing, the distal portion configured to hold solid chemical reactant therein;
a lid disposed on the proximal portion of the housing, the lid comprising a fluid inlet and a fluid outlet, the lid defining a serpentine flow path within a distal face of the lid, wherein the lid is adapted to allow gas flow within the flow path, the housing axis being perpendicular to a plane of the lid, wherein the inlet, the outlet, or both, comprises a corresponding filter configured to restrict particulate flow therethrough;
a filter disposed below the serpentine flow path and above the proximal portion of the housing, the filter having a porosity configured to restrict a passage of the solid chemical reactant therethrough; and
a resonator disposed in the distal portion of the housing, the resonator comprising extensions disposed radially around the housing axis, the resonator configured to agitate the solid chemical reactant in the housing.

Assignees

• Asm Ip Holding Bv
• Asm Ip Holding Bv

Inventors

• Shero Eric James
• White Carl Louis
• Verghese Mohith E
• Fondurulia Kyle
• Sullivan Timothy James

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/0431

  Apparatus for thermal treatment · CPC title

• C23C16/448 Primary

  characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials · CPC title

• C23C16/4485 Primary

  by evaporation without using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title