Concurrent or cyclical etch and directional deposition
US-12550637-B2 · Feb 10, 2026 · US
This page is not indexed by search engines while we improve data quality.
Evans Morgan patents
Evans Morgan is listed as an inventor on 107 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Evans Morgan |
| Total patents | 107 |
| First publication | Jun 9, 2016 |
| Latest publication | Feb 10, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Beam tuning for non-uniform ion implantation
US-2026018379-A1 · Jan 15, 2026 · US
Shadow mask apparatus and methods for variable etch depths
US-12417892-B2 · Sep 16, 2025 · US
Substrate stress management using direct selective area processing
US-2025218788-A1 · Jul 3, 2025 · US
Stress layer modification using energetic beam processing through photoresist mask
US-2025216786-A1 · Jul 3, 2025 · US
Concurrent or cyclical etch and directional deposition
US-2025046601-A1 · Feb 6, 2025 · US
Variable height slanted grating method
US-12130465-B2 · Oct 29, 2024 · US
Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions
US-12106936-B2 · Oct 1, 2024 · US
Modulation of rolling k vectors of angled gratings
US-12106935-B2 · Oct 1, 2024 · US
Forming variable depth structures with laser ablation
US-12099241-B2 · Sep 24, 2024 · US
Recent patents
Latest publications not already listed above.
Apparatus and techniques for angled etching using multielectrode extraction source
US-11967489-B2 · Apr 23, 2024 · US
Etch improvement
US-11852853-B2 · Dec 26, 2023 · US
Method for roughness reduction in manufacturing optical device structures
US-2023375774-A1 · Nov 23, 2023 · US
Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions
US-2023335375-A1 · Oct 19, 2023 · US
Method of forming a plurality of gratings
US-11766744-B2 · Sep 26, 2023 · US
Modulation of rolling k vectors of angled gratings
US-2023260746-A1 · Aug 17, 2023 · US
Forming variable depth structures with laser ablation
US-2023251430-A1 · Aug 10, 2023 · US
Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions
US-11715621-B2 · Aug 1, 2023 · US
Modulation of rolling k vectors of angled gratings
US-11670482-B2 · Jun 6, 2023 · US
Forming variable depth structures with laser ablation
US-11662524-B2 · May 30, 2023 · US
Methods for controlling etch depth by localized heating
US-11554445-B2 · Jan 17, 2023 · US
Variable height slanted grating method
US-2023010821-A1 · Jan 12, 2023 · US
Method of forming gratings
US-11512385-B2 · Nov 29, 2022 · US
Variable height slanted grating method
US-11480724-B2 · Oct 25, 2022 · US
Methods for variable etch depths
US-11456205-B2 · Sep 27, 2022 · US
Modulation of rolling K vectors of angled gratings
US-11456152-B2 · Sep 27, 2022 · US
Formation of angled gratings
US-2022301926-A1 · Sep 22, 2022 · US
System and method for forming diffracted optical element having varied gratings
US-11442207-B2 · Sep 13, 2022 · US
Controlling etch angles by substrate rotation in angled etch tools
US-2022260764-A1 · Aug 18, 2022 · US
System and method for optimally forming gratings of diffracted optical elements
US-11402649-B2 · Aug 2, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 79 |
| Varian Semiconductor Equipment Ass Inc | 27 |
| Varian Semiconductor Equipment | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G02B5/1857 | 67 |
| H10P50/242 | 30 |
| H01J37/3056 | 28 |
| G02B27/0172 | 28 |
| H01J37/3053 | 24 |