Method of forming gratings

Patent metadata

Field	Value
Publication number	US-11512385-B2
Application number	US-201916715906-A
Country	US
Kind code	B2
Filing date	Dec 16, 2019
Priority date	Dec 17, 2018
Publication date	Nov 29, 2022
Grant date	Nov 29, 2022

Abstract

Embodiments of the disclosure generally relate to methods of forming gratings. The method includes depositing a resist material on a grating material disposed over a substrate, patterning the resist material into a resist layer, projecting a first ion beam to the first device area to form a first plurality of gratings, and projecting a second ion beam to the second device area to form a second plurality of gratings. Using a patterned resist layer allows for projecting an ion beam over a large area, which is often easier than focusing the ion beam in a specific area.

First claim

What is claimed is:

1. A method, comprising:
forming a patterned resist, the forming of the patterned resist comprising:
depositing a resist material on a layer of grating material disposed over a substrate, the resist material having a first device area and a second device area;
patterning the resist material into a patterned resist layer, the patterned resist layer having:
a plurality of first pattern features disposed over the first device area, the plurality of first pattern features exposing first portions of the layer of grating material of the first device area, the first pattern features having a first slant angle, the first slant angle configured to allow beams between the first pattern features of a first beam angle to contact the layer of grating material of the first device area; and
a plurality of second pattern features disposed over the second device area, the plurality of second pattern features exposing portions of the layer of grating material of the second device area, the second pattern features having a second slant angle configured to allow beams between the second pattern features of a second beam angle to contact the layer of grating material of the second device area, the second slant angles of each of the second pattern features is different from the first slant angles of each of the first pattern features;

projecting one or more first beams at the first beam angle to the substrate, the first beams forming a plurality of first gratings in the first portions of the layer of grating material of the first device area that is exposed by the first pattern features, the first gratings having a first grating angle and the second pattern features blocking the first beams from contacting exposed second portions of the layer of grating material; and
projecting one or more second beams at the second beam angle to the substrate, the second beam forming a plurality of second gratings in the second portions of the layer of grating material of the second device area that is exposed by the second pattern features, the second gratings having a second grating angle different than the first grating angle and the second pattern features blocking the second beams from contacting exposed first portions of the layer of grating material.

2. The method of claim 1 , wherein a first depth of the plurality of first gratings has a first depth profile, and a second depth of the plurality of second gratings has a second depth profile different than the first depth profile.

3. The method of claim 2 , wherein at least one of the first depth profile or the second depth profile is a stepped profile.

4. The method of claim 2 , wherein at least one of the first depth profile or the second depth profile is a sloped profile.

5. The method of claim 1 , wherein the resist material comprises a photoresist material or imprint material.

6. The method of claim 1 , wherein:
the first grating angle of the first gratings is from about 5° to about 85°; and
the second grating angle of the second gratings is from about 95° to about 175°.

7. The method of claim 1 , wherein the first beams and the second beams comprise ions.

8. A method, comprising:
forming a patterned resist, the forming of the patterned resist comprising:
depositing a resist material over a patterned hardmask and over exposed portions of a layer of grating material exposed by the patterned hardmask, the layer of grating material disposed over a substrate, the resist material having a first device area and a second device area;
patterning the resist material into a patterned resist layer, the patterned resist layer having:
a plurality of first pattern features disposed over the first device area, the plurality of first pattern features exposing first portions of the layer of grating material of the first device area, the first pattern features having a first slant angle, the first slant angle configured to allow beams between the first pattern features of a first beam angle to contact the layer of grating material of the first device area; and
a plurality of second pattern features disposed over the second device area, the plurality of second pattern features exposing portions of the layer of grating material of the second device area, the second pattern features having a second slant angle configured to allow beams between the second pattern features of a second beam angle to contact the layer of grating material of the second device area, the second slant angles of each of the second pattern features is different from the first slant angles of each of the first pattern features;

projecting one or more first beams at the first beam angle to the substrate, the first beams forming a plurality of first gratings in the first portions of the layer of grating material of the first device area that is exposed by the first pattern features, the first gratings having a first grating angle and the second pattern features blocking the first beams from contacting exposed second portions of the layer of grating material; and
projecting one or more second beams at the second beam angle to the substrate, the second beam forming a plurality of second gratings in the second portions of the layer of grating material of the second device area that is exposed by the second pattern features, the second gratings having a second grating angle different than the first grating angle and the second pattern features blocking the second beams from contacting exposed first portions of the layer of grating material.

9. The method of claim 8 , wherein a first depth of the plurality of first gratings has a first depth profile, and a second depth of the plurality of second gratings has a second depth profile different than the first depth profile.

10. The method of claim 9 , wherein at least one of the first depth profile or the second depth profile is a stepped profile.

11. The method of claim 9 , wherein at least one of the first depth profile or the second depth profile is a sloped profile.

12. The method of claim 8 , wherein the patterned resist layer is cured by exposure to ultraviolet (UV) light.

13. The method of claim 8 , wherein the patterned resist layer is cured by heating the resist material.

14. A method, comprising:
forming a patterned resist, the forming of the patterned resist comprising:
depositing a resist material on a layer of grating material disposed over a substrate, the resist material having a first device area and a second device area;
imprinting the resist material into a patterned resist layer, the patterned resist layer having;
a plurality of first pattern features disposed over the first device area, the plurality of first pattern features exposing first portions of the layer of grating material of the first device area, the first pattern features having a first slant angle, the first slant angle configured to allow beams between the first pattern features of a first beam angle to contact the layer of grating material of the first device area; and
a plurality of second pattern features disposed over the second device area, the plurality of second pattern features exposing portions of the layer of grating material of the second device area, the second pattern features having a second slant angle configured to allow beams between the second pattern features of a second beam angle to contact the layer of grating material of the second device area, the second slant angles of each of the second pattern features is different from the first slant angles of each of the first pattern features;

projecting one or more first beams at the first beam angle to the substrate, the first beams fo

Assignees

• Applied Materials Inc

Inventors

• Olson Joseph C
• Godet Ludovic
• Meyer Timmerman Thijssen Rutger
• Evans Morgan
• Fu Jinxin

Classifications

• G03F7/2032

  Simultaneous exposure of the front side and the backside · CPC title

• G02B27/42 Primary

  Diffraction optics {, i.e. systems including a diffractive element being designed for providing a diffractive effect}(G02B27/60 takes precedence) · CPC title

• G03F7/2065 Primary

  using corpuscular radiation other than electron beams · CPC title

• C23C14/568

  Transferring the substrates through a series of coating stations (C23C14/562 takes precedence) · CPC title

• G02B27/0172

  characterised by optical features · CPC title