Modulation of rolling k vectors of angled gratings

Patent metadata

Field	Value
Publication number	US-11670482-B2
Application number	US-202017037935-A
Country	US
Kind code	B2
Filing date	Sep 30, 2020
Priority date	Dec 17, 2018
Publication date	Jun 6, 2023
Grant date	Jun 6, 2023

Abstract

Embodiments described herein relate to methods and apparatus for forming gratings having a plurality of fins with different slant angles on a substrate and forming fins with different slant angles on successive substrates using angled etch systems and/or an optical device. The methods include positioning portions of substrates retained on a platen in a path of an ion beam. The substrates have a grating material disposed thereon. The ion beam is configured to contact the grating material at an ion beam angle ϑ relative to a surface normal of the substrates and form gratings in the grating material.

First claim

What is claimed is:

1. A device comprising:
A substrate having a discrete input coupling region, a discrete intermediate coupling region, and a discrete output coupling region, each of the regions having a plurality of optical device fins disposed on the substrate, the plurality of optical device fins of each region comprising:
at least one first optical device fin having a first slant angle;
at least one second optical device fin having a second slant angle different than the first slant angle;
and at least one third optical device fin having a third slant angle different than the first slant angle and the second slant angle, wherein:
the second slant angle is greater than the first slant angle and the third slant angle is greater than the second slant angle; or
the first slant angle is greater than the second slant angle and the second slant angle is greater than the third slant angle.

2. The device of claim 1 , wherein each of the at least one first optical device fin corresponds to a first portion of optical device fins, the at least one second optical device fin corresponds to a second portion of optical device fins, and the at least one third optical device fin corresponds to a third portion of optical device fins.

3. The device of claim 1 , wherein the first, second, and third slant angles correspond to a rolling k-vector across a surface of the substrate.

4. The device of claim 1 , wherein the plurality of optical device fins include at least one of silicon oxycarbide (SiOC), titanium oxide, titanium oxide nanomaterials, niobium oxide, niobium-germanium (Nb 3 Ge), silicon dioxide (SiO 2 ), silicon oxycarbonitride (SiOCN), vanadium (IV) oxide, aluminum oxide (Al 2 O 3 ), indium tin oxide (ITO), zinc oxide (ZnO), tantalum pentoxide (Ta 2 O 5 ), silicon nitride (Si 3 N 4 ), Si 3 N 4 silicon-rich, Si 3 N 4 hydrogen-doped, Si 3 N 4 boron-doped, silicon carbon nitrate (SiCN), titanium nitride (TiN), zirconium dioxide (ZrO 2 ), germanium (Ge), gallium phosphide (GaP), poly-crystalline (PCD), nanocrystalline diamond (NCD), or doped diamond containing materials.

Assignees

• Applied Materials Inc

Inventors

• Olson Joseph C
• Evans Morgan
• Meyer Timmerman Thijssen Rutger

Classifications

• G02B2006/12107

  Grating · CPC title

• H01J37/15 Primary

  External mechanical adjustment of electron or ion optical components (H01J37/067, H01J37/20 take precedence) · CPC title

• H01J2237/3174

  Etching microareas · CPC title

• H01J37/3056

  for microworking, e. g. etching of gratings or trimming of electrical components · CPC title

• G02B5/1847

  Manufacturing methods · CPC title