Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor device
US-2026096382-A1 · Apr 2, 2026 · US
This page is not indexed by search engines while we improve data quality.
Akeboshi Yuya patents
Akeboshi Yuya is listed as an inventor on 25 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Akeboshi Yuya |
| Total patents | 25 |
| First publication | Dec 1, 2016 |
| Latest publication | Apr 2, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor device
US-12512335-B2 · Dec 30, 2025 · US
Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor device
US-2024096659-A1 · Mar 21, 2024 · US
Substrate treatment apparatus and manufacturing method of semiconductor device
US-11784064-B2 · Oct 10, 2023 · US
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device
US-2023072887-A1 · Mar 9, 2023 · US
Semiconductor memory device and manufacturing method of semiconductor memory device
US-11296111-B2 · Apr 5, 2022 · US
Plasma treatment apparatus, semiconductor manufacturing apparatus, and manufacturing method of semiconductor device
US-2022013367-A1 · Jan 13, 2022 · US
Substrate treatment apparatus and manufacturing method of semiconductor device
US-2021090913-A1 · Mar 25, 2021 · US
Semiconductor memory device and manufacturing method of semiconductor memory device
US-2021028189-A1 · Jan 28, 2021 · US
Substrate treatment apparatus and manufacturing method of semiconductor device
US-10879087-B2 · Dec 29, 2020 · US
Recent patents
Latest publications not already listed above.
Substrate treatment method and substrate treatment apparatus
US-10529588-B2 · Jan 7, 2020 · US
Substrate processing device and method of manufacturing semiconductor device
US-10403524-B2 · Sep 3, 2019 · US
Plasma treatment apparatus, semiconductor manufacturing apparatus, and manufacturing method of semiconductor device
US-2019035636-A1 · Jan 31, 2019 · US
Substrate treatment method and substrate treatment apparatus
US-2018301349-A1 · Oct 18, 2018 · US
Substrate processing device and method of manufacturing semiconductor device
US-2018277407-A1 · Sep 27, 2018 · US
Substrate treatment apparatus and substrate treatment method
US-2018265989-A1 · Sep 20, 2018 · US
Substrate treatment apparatus and manufacturing method of semiconductor device
US-2018269082-A1 · Sep 20, 2018 · US
Substrate treatment method and substrate treatment apparatus
US-10014186-B2 · Jul 3, 2018 · US
Substrate processing device and method of manufacturing semiconductor device
US-10008400-B2 · Jun 26, 2018 · US
Semiconductor device manufacture method
US-9991159-B2 · Jun 5, 2018 · US
Semiconductor device manufacturing method
US-2018082893-A1 · Mar 22, 2018 · US
Substrate processing device and method of manufacturing semiconductor device
US-2018082869-A1 · Mar 22, 2018 · US
A three-dimensional memory device
US-2017141122-A1 · May 18, 2017 · US
Three-dimensional memory device
US-9646989-B1 · May 9, 2017 · US
Substrate treatment method and substrate treatment apparatus
US-2016351417-A1 · Dec 1, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Toshiba Memory Corp | 15 |
| Kioxia Corp | 7 |
| Toshiba Kk | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P50/667 | 15 |
| H01L21/32134 | 13 |
| H10P72/0422 | 12 |
| H10P72/0426 | 11 |
| H01L21/67075 | 11 |