Plasma processing method
US-2017345666-A1 · Nov 30, 2017 · US
Protection means, e.g. coatings
Protection means, e.g. coatings · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H01J37/32559 |
| Official title | {Protection means, e.g. coatings} |
| Display label | Protection means, e.g. coatings |
| Total patents | 272 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is declining.
| Year | Patents |
|---|---|
| 2015 | 19 |
| 2016 | 20 |
| 2017 | 21 |
| 2018 | 18 |
| 2019 | 15 |
| 2020 | 22 |
| 2021 | 36 |
| 2022 | 35 |
| 2023 | 28 |
| 2024 | 22 |
| 2025 | 27 |
| 2026 | 9 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces
US-2017338083-A1 · Nov 23, 2017 · US
Protective metal oxy-fluoride coatings
US-2017323772-A1 · Nov 9, 2017 · US
Rare-earth oxide based coatings based on ion assisted deposition
US-9812341-B2 · Nov 7, 2017 · US
Non-disappearing anode for use with dielectric deposition
US-2017316924-A1 · Nov 2, 2017 · US
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-9793107-B2 · Oct 17, 2017 · US
Ion source repeller shield
US-2017287579-A1 · Oct 5, 2017 · US
Plasma processing apparatus
US-2017275761-A1 · Sep 28, 2017 · US
Anodized showerhead
US-9758869-B2 · Sep 12, 2017 · US
Method for surface treatment of upper electrode, plasma processing apparatus and upper electrode
US-9741540-B2 · Aug 22, 2017 · US
Reactive-species supply device and surface treatment apparatus
US-9713241-B2 · Jul 18, 2017 · US
Atomic layer etching system with remote plasma source and dc electrode
US-2017200587-A1 · Jul 13, 2017 · US
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-9698007-B2 · Jul 4, 2017 · US
Pre-coated shield using in vhf-rf pvd chambers
US-2017145553-A1 · May 25, 2017 · US
Plasma etching apparatus and plasma cleaning method
US-9659756-B2 · May 23, 2017 · US
Method for connecting magnetic substance target to backing plate, and magnetic substance target
US-9653270-B2 · May 16, 2017 · US
Rare-earth oxide based coatings based on ion assisted deposition
US-2017133207-A1 · May 11, 2017 · US
Ion assisted deposition for rare-earth oxide based coatings
US-2017130319-A1 · May 11, 2017 · US
Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles
US-9583369-B2 · Feb 28, 2017 · US
Hollow rf feed with coaxial dc power feed
US-2017040148-A1 · Feb 9, 2017 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H01J37/32559?
- CPC H01J37/32559 is the Cooperative Patent Classification code for “Protection means, e.g. coatings.”
- How many patents are filed under CPC H01J37/32559 (Protection means, e.g. coatings)?
- Our database includes 272 publications tagged with this CPC code.
- Is patent activity under CPC H01J37/32559 growing?
- Publication counts under this code: 22 in 2024 vs 27 in 2025 (latest complete years).