Hollow rf feed with coaxial dc power feed

Patent metadata

Field	Value
Publication number	US-2017040148-A1
Application number	US-201514817372-A
Country	US
Kind code	A1
Filing date	Aug 4, 2015
Priority date	Aug 4, 2015
Publication date	Feb 9, 2017
Grant date	—

Abstract

A feed tube for a substrate processing system includes an outer tube and a feed rod. The feed rod is arranged within the outer tube. The feed rod is arranged to provide radio frequency power to the substrate processing system and the outer tube provides a return for the radio frequency power. At least one conductor is routed within the feed rod. The conductor is arranged to provide electrical power to at least one component of the substrate processing system separate from the radio frequency power provided by the feed rod.

First claim

What is claimed is:

1 . A feed tube for a substrate processing system, the feed tube comprising:
an outer tube; a feed rod arranged within the outer tube, wherein the feed rod is arranged to provide radio frequency (RF) power to the substrate processing system and the outer tube provides a return for the RF power; and at least one conductor routed within the feed rod, wherein the conductor is arranged to provide electrical power to at least one component of the substrate processing system separate from the RF power provided by the feed rod.

2 . The feed tube of claim 1 , wherein the feed tube corresponds to a hollow RF feed tube.

3 . The feed tube of claim 1 , wherein the outer tube and the feed rod are connected to a baseplate of a substrate support.

4 . The feed tube of claim 1 , wherein the at least one conductor is encased within an insulator material.

5 . The feed tube of claim 1 , wherein the at least one conductor comprises a first conductor and a second conductor.

6 . The feed tube of claim 5 , wherein the first conductor is encased within a first insulator material, the second conductor is encased within a second insulator material, and the first conductor, the first insulator material, the second conductor, and the second insulator material are encased within a third insulator material.

7 . The feed tube of claim 1 , further comprising a socket assembly connected to the at least one conductor and to wiring of the substrate processing system.

8 . The feed tube of claim 7 , wherein the wiring is electrically connected to a substrate support.

9 . The feed tube of claim 7 , wherein the wiring is connected to a heating plate.

10 . The feed tube of claim 1 , further comprising a plurality of disc inserts arranged within the feed rod, wherein the at least one conductor is routed through respective openings in the plurality of disc inserts.

11 . A method for providing electrical power to a substrate processing system, the method comprising:
using a feed rod arranged within an outer tube of a feed tube, providing radio frequency (RF) power to the substrate processing system; providing a return for the RF power using the outer tube; routing at least one conductor through the feed rod to the substrate processing system; and providing, using the at least one conductor, electrical power to at least one component of the substrate processing system separate from the RF power provided by the feed rod.

12 . The method of claim 11 , wherein the feed tube corresponds to a hollow RF feed tube.

13 . The method of claim 11 , further comprising connecting the outer tube and the feed rod to a baseplate of a substrate support.

14 . The method of claim 11 , further comprising encasing the at least one conductor within an insulator material.

15 . The method of claim 11 , wherein the at least one conductor comprises a first conductor and a second conductor.

16 . The method of claim 15 , further comprising encasing the first conductor within a first insulator material, encasing the second conductor within a second insulator material, and encasing the first conductor, the first insulator material, the second conductor, and the second insulator material within a third insulator material.

17 . The method of claim 11 , further comprising connecting the at least one conductor to wiring of the substrate processing system using a socket assembly.

18 . The method of claim 17 , further comprising electrically connecting the wiring to a substrate support.

19 . The method of claim 17 , further comprising connecting the wiring to a heating plate.

20 . The method of claim 11 , further comprising arranging a plurality of disc inserts within the feed rod and routing the at least one conductor through respective openings in the plurality of disc inserts.

Assignees

• Lam Res Corp

Inventors

• Augustino Jason
• Drewery John
• Paterson Alex
• Benjamin Neil

Classifications

• H01J37/32577

  Electrical connecting means · CPC title

• H01P3/06

  Coaxial lines · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• H01J37/32596 Primary

  Hollow cathodes · CPC title

• H01J37/32559

  Protection means, e.g. coatings · CPC title