Multi-surface nanoparticle sources and deposition systems
US-2015376772-A1 · Dec 31, 2015 · US
Method for connecting magnetic substance target to backing plate, and magnetic substance target
US9653270B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9653270-B2 |
| Application number | US-2358808-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 31, 2008 |
| Priority date | Dec 19, 2001 |
| Publication date | May 16, 2017 |
| Grant date | May 16, 2017 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
A method for connecting a magnetic substance target to a backing plate with less variation in plate thickness, characterized in having the steps of connecting the magnetic substance target to an aluminum plate beforehand while maintaining the flatness, connecting the magnetic substance target connected to the aluminum plate to the backing plate while maintaining the flatness, and grinding out the aluminum plate, whereby the flatness of the magnetic substance target can be maintained until the magnetic substance target is connected to the backing plate by a relatively simple operation.
First claim
Opening claim text (preview).
The invention claimed is: 1. An assembly, comprising: a magnetic substance target, a backing plate, and an aluminum reinforcing plate, said magnetic substance target having an as-wrought structure with remnant stress sufficient to provide magnetic anisotropy necessary for enabling magnetron sputtering, wherein said magnetic substance target has a surface face, an opposite face bonded to said backing plate, and a thickness defined by a distance between said surface face and said opposite face, the thickness being 5 mm or less on average along said surface face and having a variation of 4% or less of said average thickness, wherein the surface face is bonded to the aluminum reinforcing plate such that the aluminum reinforcing plate is integral to the magnetic substance target, and wherein the opposite face is bonded to the backing plate after bonding the surface face to the reinforcing plate. 2. An assembly according to claim 1 , wherein the magnetic substance target is made of a magnetic substance selected from the group consisting of iron, cobalt, nickel, platinum and alloys thereof. 3. The assembly according to claim 2 , wherein the surface face is bonded to the aluminum reinforcing plate with an adhesive or brazing material.
Assignees
Inventors
Classifications
Protection means, e.g. coatings · CPC title
Cathode assembly for sputtering apparatus, e.g. Target · CPC title
Material · CPC title
Targets · CPC title
- H01J37/3435Primary
Target holders (includes backing plates and endblocks) · CPC title
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Frequently asked questions
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- What does patent US9653270B2 cover?
- A method for connecting a magnetic substance target to a backing plate with less variation in plate thickness, characterized in having the steps of connecting the magnetic substance target to an aluminum plate beforehand while maintaining the flatness, connecting the magnetic substance target connected to the aluminum plate to the backing plate while maintaining the flatness, and grinding out t…
- Who is the assignee on this patent?
- Yamakoshi Yasuhiro, Mogaki Kenichi, Jx Nippon Mining & Metals Corp
- What technology area does this patent fall under?
- Primary CPC classification H01J37/3435. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 16 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).