Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-10337103-B2
Application number	US-201615220385-A
Country	US
Kind code	B2
Filing date	Jul 26, 2016
Priority date	Sep 11, 2015
Publication date	Jul 2, 2019
Grant date	Jul 2, 2019

Abstract

Provided is a substrate processing apparatus including a tube having an inner space therein, a substrate supporting unit including a plurality of isolation plates configured to vertically stack a plurality of substrates thereon and divide a processing space, in which the plurality of substrates are processed, into a plurality of processing spaces in the tube, a gas supply unit configured to supply a processing gas to the plurality of substrates, and an exhaust unit disposed to face the gas supply unit to exhaust a gas inside the tube. A plurality of through-holes are defined in each of the isolation plates.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a tube having an inner space therein;
a substrate supporting unit comprising, in the tube, a substrate holder configured to stack a plurality of substrates, and a plurality of isolation plates configured to divide a processing space into a plurality of processing spaces, in which the plurality of substrates are processed, respectively, while being spaced apart from each other in a vertical direction;
a gas supply unit configured to supply a processing gas to the plurality of substrates; and
an exhaust unit disposed to face the gas supply unit to exhaust a gas inside the tube,
wherein the plurality of substrates are disposed in spaces between the isolation plates, respectively, while being spaced apart from the isolation plates, and
a plurality of through-holes through which the processing gas passes are defined in the isolation plates so that a portion of the processing gas supplied to one processing space is supplied to another processing space,
wherein the through-holes are formed in a slit shape extending in a direction crossing a flow direction of a gas flowing from the gas supply unit to the exhaust unit, and the plurality of through-holes are defined in a line along the flow direction of the gas.

2. The substrate processing apparatus of claim 1 , wherein the gas supply unit comprises a plurality of injection nozzles installed at heights different from each other to respectively correspond to the processing spaces at one side of the tube, and
the exhaust unit comprises a plurality of exhaust ports vertically installed to correspond to the injection nozzle on the other side of the tube.

3. The substrate processing apparatus of claim 2 , wherein at least a portion of the injection nozzles passes through the tube.

4. The substrate processing apparatus of claim 1 , wherein the sum of effective areas of the through-holes disposed adjacent to the gas supply unit is different from that of effective areas of the through-holes disposed far from the gas supply unit with respect to a central portion of the isolation plate.

5. The substrate processing apparatus of claim 4 , wherein the total sum of the areas of the plurality of through-holes is 5% to 50% with respect to an entire area of the isolation plate.

Assignees

• Eugene Technology Co Ltd

Inventors

• Hyon Jun Jin
• Je Sung Tae
• Song Byoung Gyu
• Kim Yong Ki
• Kim Kyoung Hun
• Kim Chang Dol
• Shin Yang Sik
• Kim Jae Woo

Classifications

• C23C16/4583

  the substrate being supported substantially horizontally · CPC title

• C23C16/45504

  Laminar flow · CPC title

• C23C16/45578 Primary

  Elongated nozzles, tubes with holes · CPC title