Substrate processing apparatus
US-12488963-B2 · Dec 2, 2025 · US
This page is not indexed by search engines while we improve data quality.
Shin Yang Sik patents
Shin Yang Sik is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Shin Yang Sik |
| Total patents | 12 |
| First publication | Mar 16, 2017 |
| Latest publication | Dec 2, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate support assembly and substrate processing apparatus
US-12243767-B2 · Mar 4, 2025 · US
Apparatus for processing substrate
US-2023411203-A1 · Dec 21, 2023 · US
Substrate processing apparatus
US-2023005712-A1 · Jan 5, 2023 · US
Substrate support assembly and substrate processing apparatus
US-2022336259-A1 · Oct 20, 2022 · US
Apparatus for processing substrate
US-2022093445-A1 · Mar 24, 2022 · US
Substrate processing apparatus and substrate processing method using the same
US-10793949-B2 · Oct 6, 2020 · US
Substrate processing apparatus
US-10337103-B2 · Jul 2, 2019 · US
Substrate processing apparatus
US-10161036-B2 · Dec 25, 2018 · US
Substrate processing apparatus and substrate processing method using the same
US-2017137938-A1 · May 18, 2017 · US
Recent patents
Latest publications not already listed above.
Substrate processing apparatus
US-2017073813-A1 · Mar 16, 2017 · US
Substrate processing apparatus
US-2017073810-A1 · Mar 16, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Eugene Technology Co Ltd | 12 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0402 | 8 |
| C23C16/4412 | 6 |
| H10P72/7612 | 4 |
| H10P72/70 | 4 |
| H01J37/32 | 4 |