Substrate processing apparatus including exhaust ports and substrate processing method

Patent metadata

Field	Value
Publication number	US-9875895-B2
Application number	US-201214357592-A
Country	US
Kind code	B2
Filing date	Nov 16, 2012
Priority date	Nov 17, 2011
Publication date	Jan 23, 2018
Grant date	Jan 23, 2018

Abstract

Provided is a substrate processing apparatus. The substrate processing apparatus in which processes with respect to substrates are performed includes a lower chamber having an opened upper side, the lower chamber including a passage allowing the substrates to pass therethrough in a side thereof, an external reaction tube closing the opened upper side of the lower chamber to provide a process space in which the processes are performed, a substrate holder on which the one or more substrates are vertically stacked, the substrate holder being movable between a stacking position in which the substrates are stacked within the substrate holder and a process position in which the processes with respect to the substrates are performed, at least one supply nozzle disposed along an inner wall of the external reaction tube, the at least one supply nozzle having a supply hole for discharging a reaction gas, at least one exhaust nozzle disposed along the inner wall of the external reaction tube, the at least one exhaust nozzle having an exhaust hole for suctioning an non-reaction gas and byproducts within the process space, and a rear exhaust line connected to the exhaust nozzle to discharge the non-reaction gas and the byproducts which are suctioned through the exhaust hole. The lower chamber includes an exhaust port connecting the exhaust nozzle to the rear exhaust line and an auxiliary exhaust port connecting a stacking space defined within the lower chamber to the rear exhaust line.

First claim

What is claimed is:

1. A substrate processing apparatus in which processes with respect to substrates are performed, the substrate processing apparatus comprising:
a lower chamber having an opened upper side, the lower chamber comprising a passage allowing the substrates to pass therethrough in a side thereof;
an external reaction tube closing the opened upper side of the lower chamber to provide a process space in which the processes are performed;
a substrate holder configured to support one or more substrates vertically stacked, the substrate holder being movable between a stacking position in which the substrates are stacked and a process position in which the processes with respect to the substrates are performed;
at least one supply nozzle disposed along an inner wall of the external reaction tube, the at least one supply nozzle having a supply hole for discharging a reaction gas;
at least one exhaust nozzle disposed along the inner wall of the external reaction tube, the at least one exhaust nozzle having an exhaust hole for suctioning an non-reaction gas and byproducts within the process space;
an exhaust port formed in the lower chamber and connected to said at least one exhaust nozzle to exhaust the process space;
an auxiliary exhaust port formed in the lower chamber and connected to a stacking space defined within the lower chamber to exhaust the stacking space;
a second exhaust line discharging exhaust gas from the exhaust port and the auxiliary exhaust port to an outside;
a first exhaust line connecting the exhaust port and the second exhaust line;
a main exhaust valve disposed on the first exhaust line to open or close the first exhaust line;
a pump disposed on the first exhaust line to pump the inside of the first exhaust line;
an auxiliary exhaust line connecting the auxiliary exhaust port and the second exhaust line;
a first auxiliary exhaust valve opening or closing the auxiliary exhaust line;
a second auxiliary exhaust valve disposed on a rear side of the first auxiliary exhaust valve to open or close the auxiliary exhaust line;
a connection line connecting the auxiliary exhaust line to the first exhaust line, the connection line having one end connected between the first auxiliary exhaust valve and the second auxiliary exhaust valve and the other end connected to a front portion of the pump; and
a connection valve disposed on the connection line to open or close the connection line,
wherein, before the processes are performed, the first auxiliary exhaust valve, the connection valve, and the main exhaust valve are in opened states, and the second auxiliary exhaust valve is in a closed state,
during the processes are performed, the first auxiliary exhaust valve, the second exhaust valve and the main exhaust valve are in opened states, and the connection valve is in a closed state.

2. The substrate processing apparatus of claim 1 , wherein the substrate holder is disposed within the stacking space at the stacking position and disposed within the process space at the process position.

3. The substrate processing apparatus of claim 1 , wherein the stacking space has a pressure greater than that of the process space.

Assignees

• Eugene Technology Co Ltd

Inventors

• Yang Il-Kwang
• Je Sung-Tae
• Song Byoung-Gyu
• Kim Yong-Ki
• Kim Kyong-Hun
• Shin Yang-Sik

Classifications

• H10P14/3444

  P-type · CPC title

• H10P14/3442

  N-type · CPC title

• H10P72/3312

  Vertical transfer of a batch of workpieces · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title