Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-2017073813-A1
Application number	US-201615220385-A
Country	US
Kind code	A1
Filing date	Jul 26, 2016
Priority date	Sep 11, 2015
Publication date	Mar 16, 2017
Grant date	—

Abstract

Provided is a substrate processing apparatus including a tube having an inner space therein, a substrate supporting unit including a plurality of isolation plates configured to vertically stack a plurality of substrates thereon and divide a processing space, in which the plurality of substrates are processed, into a plurality of processing spaces in the tube, a gas supply unit configured to supply a processing gas to the plurality of substrates, and an exhaust unit disposed to face the gas supply unit to exhaust a gas inside the tube. A plurality of through-holes are defined in each of the isolation plates.

First claim

What is claimed is:

1 . A substrate processing apparatus comprising:
a tube having an inner space therein; a substrate supporting unit comprising a plurality of isolation plates configured to vertically stack a plurality of substrates thereon and divide a processing space, in which the plurality of substrates are processed, into a plurality of processing spaces in the tube; a gas supply unit configured to supply a processing gas to the plurality of substrates; and an exhaust unit disposed to face the gas supply unit to exhaust a gas inside the tube, wherein a plurality of through-holes are provided in each of the isolation plates.

2 . The substrate processing apparatus of claim 1 , wherein the plurality of isolation plates are vertically spaced apart from each other, and
the plurality of substrates are spaced apart from the plurality of isolation plates and stacked between the plurality of isolation plates, respectively.

3 . The substrate processing apparatus of claim 1 , wherein the gas supply unit comprises a plurality of injection nozzles installed at heights different from each other to respectively correspond to the processing spaces at one side of the tube, and
the exhaust unit comprises a plurality of exhaust ports vertically installed to correspond to the injection nozzle on the other side of the tube.

4 . The substrate processing apparatus of claim 3 , wherein at least a portion of the injection nozzle passes through the tube.

5 . The substrate processing apparatus of claims 1 , wherein the plurality of through-holes are defined radially toward a substrate disposed therebelow.

6 . The substrate processing apparatus of claim 5 , wherein the sum of effective areas of the through-holes defined in a central portion of the isolation plate is different from that of effective areas of the through-holes defined in an outer portion thereof.

7 . The substrate processing apparatus of claim 6 , wherein the total sum of the areas of the plurality of through-holes is 5% to 50% with respect to an entire area of the isolation plates.

8 . The substrate processing apparatus of claims 1 , wherein the through-hole extends in a direction crossing a flow direction of a gas flowing from the gas supply unit to the exhaust unit, and
the plurality of through-holes are defined in a line along the flow direction of the gas.

9 . The substrate processing apparatus of claim 8 , wherein the sum of effective areas of the through-holes disposed adjacent to the gas supply unit is different from that of effective areas of the through-holes disposed far from the gas supply unit with respect to a central portion of the isolation plate.

10 . The substrate processing apparatus of claim 9 , wherein the total sum of the areas of the plurality of through-holes is 5% to 50% with respect to an entire area of the isolation plate.

Assignees

• Eugene Technology Co Ltd

Inventors

• Hyon Jun Jin
• Je Sung Tae
• Song Byoung Gyu
• Kim Yong Ki
• Kim Kyoung Hun
• Kim Chang Dol
• Shin Yang Sik
• Kim Jae Woo

Classifications

• C23C16/45504

  Laminar flow · CPC title

• C23C16/45578 Primary

  Elongated nozzles, tubes with holes · CPC title

• C23C16/4583

  the substrate being supported substantially horizontally · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title