Showerhead pumping geometry for precursor containment
US-12540398-B2 · Feb 3, 2026 · US
This page is not indexed by search engines while we improve data quality.
Shah Kartik patents
Shah Kartik is listed as an inventor on 120 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Shah Kartik |
| Total patents | 120 |
| First publication | Mar 19, 2015 |
| Latest publication | Feb 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
US-2026029784-A1 · Jan 29, 2026 · US
Gas distribution plate
US-D1103948-S · Dec 2, 2025 · US
Gas distribution plate
US-D1104086-S · Dec 2, 2025 · US
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
US-12443175-B2 · Oct 14, 2025 · US
Thermal processing susceptor
US-12400904-B2 · Aug 26, 2025 · US
Gas distribution plate
US-D1085029-S · Jul 22, 2025 · US
Plasma showerhead with improved uniformity
US-12340980-B2 · Jun 24, 2025 · US
Baffle implementation for improving bottom purge gas flow uniformity
US-2025201534-A1 · Jun 19, 2025 · US
Gas delivery system for a thermal processing apparatus
US-2025167008-A1 · May 22, 2025 · US
Recent patents
Latest publications not already listed above.
Thermal shield for processing chamber
US-12308218-B2 · May 20, 2025 · US
Gas distribution plate
US-D1071103-S · Apr 15, 2025 · US
Baffle implementation for improving bottom purge gas flow uniformity
US-12183553-B2 · Dec 31, 2024 · US
Processing system and method of delivering a reactant gas
US-12139790-B2 · Nov 12, 2024 · US
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
US-2024310819-A1 · Sep 19, 2024 · US
Gas distribution plate
US-D1037778-S · Aug 6, 2024 · US
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
US-12001197-B2 · Jun 4, 2024 · US
Thermal chamber with improved thermal uniformity
US-11978646-B2 · May 7, 2024 · US
Asymmetric injection for better wafer uniformity
US-11959169-B2 · Apr 16, 2024 · US
Thermal processing susceptor
US-2024112945-A1 · Apr 4, 2024 · US
Gas supply member with baffle
US-11885021-B2 · Jan 30, 2024 · US
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber
US-2023407471-A1 · Dec 21, 2023 · US
Thermal processing susceptor
US-11848226-B2 · Dec 19, 2023 · US
Heater assembly with purge gap control and temperature uniformity for batch processing chambers
US-11818810-B2 · Nov 14, 2023 · US
Chamber injector
US-11807931-B2 · Nov 7, 2023 · US
Protection of aluminum process chamber components
US-11810766-B2 · Nov 7, 2023 · US
Plasma showerhead with improved uniformity
US-2023317416-A1 · Oct 5, 2023 · US
Thermal shield for processing chamber
US-2023282454-A1 · Sep 7, 2023 · US
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber
US-11732355-B2 · Aug 22, 2023 · US
Enhanced process and hardware architecture to detect and correct realtime product substrates
US-11735447-B2 · Aug 22, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 119 |
| Applied Mateirals Inc | 1 |
| Beijing E Town Semiconductor Tech Co Ltd | 1 |
| Mattson Tech Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0402 | 32 |
| H10P72/0436 | 25 |
| C23C16/4583 | 25 |
| H10P72/0431 | 21 |
| H01J37/3244 | 20 |