Gas supply member with baffle

Patent metadata

Field	Value
Publication number	US-11885021-B2
Application number	US-202117317418-A
Country	US
Kind code	B2
Filing date	May 11, 2021
Priority date	Jul 31, 2017
Publication date	Jan 30, 2024
Grant date	Jan 30, 2024

Abstract

A gas supply member includes a first side opposite a second side and an inner surface defining a first opening extending between the first and second sides. The gas supply member includes a third side orthogonal to the first side, the third side includes a first extension that has a face partially defining the second side, and the first extension includes a first plurality of holes extending through the first extension to the face. The gas supply member includes a fourth side opposite the third side, the fourth side includes a protrusion that has a face partially defining the second side. The gas supply member also includes a baffle disposed adjacent to the inner surface, the baffle includes a first portion extending from the inner surface and a second portion attached to the first portion, and the second portion orthogonal to the first portion and parallel to the third side.

First claim

What is claimed is:

1. A gas supply member comprising:
a first side;
a second side opposite the first side;
an inner surface defining a first opening, the first opening extending between the first side and the second side;
a third side orthogonal to the first side, the third side comprising:
a first extension having a face partially defining the second side and comprising a first plurality of holes extending through the first extension to the face;

a fourth side opposite the third side, the fourth side comprising:
a protrusion, the protrusion having a face partially defining the second side; and

a baffle disposed adjacent to the inner surface, the baffle comprising:
a first portion extending from the inner surface;
a second portion attached to the first portion, the second portion orthogonal to the first portion and parallel to the third side; and
a cavity formed between the first portion and the second side
a second plurality of holes formed in the third side, wherein the second plurality of holes is in fluid communication with the baffle.

2. The gas supply member of claim 1 , further comprising a first angular surface extending from the third side to beyond the first opening, partially defining the second side.

3. The gas supply member of claim 2 , wherein each of the first plurality of holes extends through the first angular surface.

4. The gas supply member of claim 2 , further comprising a second angular surface extending from the face of the protrusion towards the first opening partially defining the second side.

5. The gas supply member of claim 4 , further comprising a connecting surface between the first angular surface and the second angular surface.

6. The gas supply member of claim 1 , wherein the protrusion has a second plurality of holes extending to the second side.

7. The gas supply member of claim 1 , wherein the cavity comprises a first rounded corner and a second rounded corner.

8. The gas supply member of claim 1 , wherein the second portion of the baffle has a textured surface.

9. The gas supply member of claim 8 , wherein the textured surface comprises projections having a size of about 25 microns to about 100 microns.

10. A gas supply member comprising:
a first side;
a second side opposite the first side;
an inner surface defining a first opening, the first opening extending between the first side and the second side;
a third side orthogonal to the first side, the third side comprising:
a first extension having a face partially defining the second side and comprising a first plurality of holes extending through the first extension to the face;

a fourth side opposite the third side, the fourth side comprising:
a protrusion, the protrusion having a face partially defining the second side; and

a first angular surface extending from the third side, to beyond the first opening, partially defining the second side;
a baffle disposed adjacent to the inner surface, the baffle comprising:
a first portion extending from the inner surface; and
a second portion attached to the first portion, the second portion has a textured surface, and the second portion orthogonal to the first portion and parallel to the third side; and
a second plurality of holes formed in the third side, wherein the second plurality of holes is in fluid communication with the baffle.

11. The gas supply member of claim 10 , wherein each of the first plurality of holes extends through the first angular surface.

12. The gas supply member of claim 10 , further comprising a second angular surface extending from the face of the protrusion towards the first opening partially defining the second side.

13. The gas supply member of claim 12 , further comprising a connecting surface between the first angular surface and the second angular surface.

14. The gas supply member of claim 10 , wherein the textured surface comprises projections having a size of about 25 microns to about 100 microns.

15. The gas supply member of claim 10 , wherein the baffle further comprises a cavity formed between the first portion and the second side.

16. A gas supply member comprising:
a first side;
a second side opposite the first side;
an inner surface defining a first opening, the first opening extending between the first side and the second side;
a third side orthogonal to the first side, the third side comprising:
a first extension having a face partially defining the second side and comprising a first plurality of holes extending through the first extension to the face;

a fourth side opposite the third side, the fourth side comprising:
a protrusion, the protrusion having a face partially defining the second side; and

a baffle disposed adjacent to the inner surface, the baffle comprising:
a first portion extending from the inner surface;
a second portion attached to the first portion, the second portion orthogonal to the first portion and parallel to the third side;
a cavity formed between the first portion and the second side; and
a second plurality of holes formed in the third side, wherein the second plurality of holes are fluidly coupled to the baffle by a gas inlet.

17. The gas supply member of claim 16 , further comprising a first angular surface extending from the third side to beyond the first opening, partially defining the second side.

18. The gas supply member of claim 17 , wherein each of the first plurality of holes extends through the first angular surface.

19. The gas supply member of claim 17 , further comprising a second angular surface extending from the face of the protrusion towards the first opening partially defining the second side.

Assignees

• Applied Materials Inc

Inventors

• Shah Kartik
• Pandey Vishwas Kumar
• Pradhan Kailash
• Tallavarjula Sairaju
• George Rene
• Shono Eric Kihara
• Bottini Philip A
• Curtis Roger

Classifications

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• C23C16/44

  characterised by the method of coating (C23C16/04 takes precedence) · CPC title

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• C23C16/45591 Primary

  Fixed means, e.g. wings, baffles · CPC title

• C23C14/564

  Means for minimising impurities in the coating chamber such as dust, moisture, residual gases · CPC title