Eco-efficiency (sustainability) dashboard for semiconductor manufacturing

Patent metadata

Field	Value
Publication number	US-12443175-B2
Application number	US-202418679298-A
Country	US
Kind code	B2
Filing date	May 30, 2024
Priority date	Apr 14, 2021
Publication date	Oct 14, 2025
Grant date	Oct 14, 2025

Abstract

A first selection of a first fabrication process and/or first manufacturing equipment to perform manufacturing operations of the first fabrication process is received. The first selection is input into a digital replica of the first manufacturing equipment, where the digital replica outputs physical conditions of the first fabrication process. Environmental resource usage data indicative of a first environmental resource consumption of the first fabrication process run on the first manufacturing equipment based on the physical conditions of the first fabrication process is determined. A modification to the first fabrication process that reduces the environmental resource consumption of the first fabrication process run on the first manufacturing equipment is determined. Applying the modification to the first fabrication and/or providing the modification for display by a graphical user interface (GUI) is performed.

First claim

What is claimed is:

1. A system comprising:
a memory; and
a processing device, coupled to the memory, to:
receive a first selection of at least one of a first fabrication process or a first manufacturing equipment to perform manufacturing operations of the first fabrication process;
input the first selection into a digital replica of the first manufacturing equipment, wherein the digital replica outputs physical conditions of the first fabrication process;
determine environmental resource usage data indicative of a first environmental resource consumption of the first fabrication process run on the first manufacturing equipment based on the physical conditions of the first fabrication process;
determine, within a process parameter value window, an eco-optimized process parameter window, wherein one or more process parameter values are within the eco-optimized process parameter window;
determine a modification to the first fabrication process that reduces the first environmental resource consumption of the first fabrication process run on the first manufacturing equipment based on the one or more process parameter values of the eco-optimized process parameter window; and
perform at least one of a) applying the modification to the first fabrication process or b) providing the modification for display by a graphical user interface (GUI).

2. The system of claim 1 , wherein the processing device is further to:
use the environmental resource usage data as input to a machine learning model; and
obtain one or more outputs of the machine learning model, the one or more outputs indicating the modification.

3. The system of claim 1 , wherein the processing device is further to:
determine that the first selection fails to satisfy a threshold eco-efficiency based on the environmental resource usage data; and
responsive to determining that the first selection fails to satisfy the threshold eco-efficiency, perform an optimization of the first selection, wherein to perform the optimization of the first selection the processing device is to identify one or more modifications to the first selection that, when applied, result in an updated eco-efficiency that satisfies the threshold eco-efficiency.

4. The system of claim 1 , wherein the environmental resource usage data comprises one of an energy consumption, a gas consumption, or a water consumption associated with the first manufacturing equipment to perform manufacturing operations of the first fabrication process.

5. The system of claim 1 , wherein the digital replica comprises a physics based model of the first manufacturing equipment to perform the manufacturing operations of the first fabrication process.

6. The system of claim 1 , wherein the processing device is further to:
receive a second selection of manufacturing equipment to perform second manufacturing operations in a second fabrication process;
receive, from one or more sensors associated with the second selection of manufacturing equipment, second sensor data associated with the second manufacturing operations;
update the digital replica to generate an updated digital replica, wherein the updated digital replica is associated with the first and second selection of manufacturing equipment; and
obtain, from the digital replica, one or more outputs comprising aggregate environmental resource data indicative of an environmental resource consumption of the first selection and the second selection.

7. The system of claim 1 , wherein the processing device is further to:
determine the process parameter value window for a process parameter associated with a first manufacturing operation of the manufacturing operations; and.

8. A system comprising:
a memory; and
a set of one or more processing devices coupled to a memory, wherein the set of one or more processing devices is to:
identify a fabrication process associated with a manufacturing equipment of a manufacturing environment;
determine, based on one or more outputs of a digital replica of the manufacturing equipment, values for one or more process parameters for the fabrication process that will reduce environmental resource consumption of the fabrication process when run using the manufacturing equipment, wherein the values for the one or more process parameters correspond to an eco-optimized process parameter window that is associated with an improved reduction of the environmental resource consumption than values for one or more additional process parameters that are outside of the eco-optimized process parameter window; and
apply the determined values for the one or more process parameters to the fabrication process.

9. The system of claim 8 , wherein the environmental resource consumption comprises at least one of an energy consumption, a gas consumption, or a water consumption associated with the manufacturing equipment to perform manufacturing operations of the fabrication process.

10. The system of claim 9 , wherein the eco-optimized process parameter window is associated with a priority optimization of one or more of the energy consumption, the gas consumption, or the water consumption of the manufacturing equipment to perform manufacturing operations of the fabrication process.

11. The system of claim 8 , wherein the digital replica comprises a physics based model of the manufacturing equipment to perform manufacturing operations of the fabrication process.

12. The system of claim 8 , wherein to determine the values for the one or more process parameters for the fabrication process, the set of one or more processing devices is to:
provide information associated with the identified fabrication process as an input to the digital replica of the manufacturing equipment;
obtain, based on one or more outputs of the digital replica, estimated physical conditions of the environment within the manufacturing equipment during the fabrication process; and
determine environmental resource usage data indicative of the environmental resource consumption based on the estimated physical conditions of the environment within the manufacturing equipment during the fabrication process,
wherein the values for the one or more process parameters are determined based on the environmental resource usage data.

13. The system of claim 12 , wherein the set of one or more processing devices is further to:
provide the environmental resource usage data as an input to a machine learning model; and
obtain one or more outputs of the machine learning model, wherein the one or more outputs indicate the values for the set of process parameters and a level of confidence that the values for the set of process parameters, when applied to the fabrication process, improves the environmental resource consumption of the fabrication process.

14. The system of claim 8 , wherein the set of one or more processing devices is further to:
provide a notification of the determined values for the one or more process parameters for display via a user interface.

15. The system of claim 8 , wherein the fabrication process associated with the manufacturing equipment is identified responsive detecting a user selection of at least one of the fabrication process or the manufacturing equipment via a user interface.

16. A non-transitory computer readable medium comprising instructions that, when executed by a set of one or more processing devices, cause the set of one or more processing devices to:
identify a fabrication process associated with a manufacturing equipment of a manufacturing environment;
determine, based on one or more outputs of a digital replica of th

Assignees

• Applied Materials Inc

Inventors

• Moradian Ala
• Neville Elizabeth
• Kelkar Umesh Madhav
• Denome Mark R
• Kothnur Prashanth
• Ramanathan Karthik
• Shah Kartik
• Trejo Orlando
• Meirovich Sergey

Classifications

• H10P72/0612 Primary

  Production flow monitoring, e.g. for increasing throughput · CPC title

• G05B2219/45031

  Manufacturing semiconductor wafers · CPC title

• G05B2219/32335

  Use of ann, neural network · CPC title

• G05B2219/32359

  Modeling, simulating assembly operations · CPC title

• G05B13/027

  using neural networks only · CPC title