Heater assembly with purge gap control and temperature uniformity for batch processing chambers

Patent metadata

Field	Value
Publication number	US-11818810-B2
Application number	US-202117214340-A
Country	US
Kind code	B2
Filing date	Mar 26, 2021
Priority date	Mar 26, 2021
Publication date	Nov 14, 2023
Grant date	Nov 14, 2023

Abstract

A heater assembly having a backside purge gap formed between a top plate and a heater of the heater assembly, the top plate having a top plate wall. The top plate wall having an upper portion, a middle portion and a lower portion, the middle portion forming an incline relative to the top portion.

First claim

What is claimed is:

1. A heater assembly comprising:
a heater comprising a top surface, a bottom surface and a heater wall extending from the top surface to the bottom surface defining a thickness;
a top plate having a top surface, a bottom surface defining a top thickness of the top plate, the top plate having at least one opening through the thickness to allow the heater to pass through the opening, the opening having a peripheral inner surface defining a top plate wall extending the thickness of the top plate, the top plate wall comprising an upper portion and a bottom portion, the bottom portion forming an angle Θ relative to the upper portion;
a shield plate having a top surface, a bottom surface and an outer peripheral edge, the shield plate having an opening extending from the top surface to the bottom surface in an inner portion, the bottom surface of the heater spaced a distance from the top surface of the shield plate, the shield plate having a top portion having a top surface in contact with the bottom surface of the top plate, the top portion of the shield plate has a total thickness T SP defined by the top surface of the top portion of the shield plate to the bottom surface of the shield plate, the top portion having a plurality of holes extending through the top portion to the outer peripheral edge, the top portion having a ring-shaped groove positioned a distance below the top surface of the top portion on the outer peripheral edge of the shield plate; and
a split ring positioned within the ring-shaped groove of the shield plate.

2. The heater assembly of claim 1 , wherein the heater wall is at a right angle relative to the bottom surface and top surface of the heater.

3. The heater assembly of claim 1 , wherein a backside purge gap is formed between the heater wall and the top plate wall, the backside purge gap having a width D G .

4. The heater assembly of claim 3 , wherein the width D G is greater between the bottom portion of the top plate and the heater wall relative to the upper portion of the top plate and the heater wall.

5. The heater assembly of claim 1 , wherein the width D G is in the range of 1 mm to 5 mm.

6. The heater assembly of claim 1 , wherein angle Θ is in a range of from 10 to 30 degrees.

7. The heater assembly of claim 1 , further comprising a heater standoff having a top end and a bottom end, the top end in contact with the bottom surface of the heater.

8. The heater assembly of claim 7 , further comprising a shield shaft having a top end and a bottom end, an inside surface surrounding an open interior region and an outside surface, the heater standoff located within the open interior region and the top end of the heater standoff extending above the top end of the shield shaft.

Assignees

• Applied Materials Inc

Inventors

• Kashyap Dhritiman Subha
• Sherekar Amit Rajendra
• Shah Kartik
• Agarwal Ashutosh
• Hoffmann Eric J
• Baluja Sanjeev
• Parkhe Vijay D

Classifications

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/72

  using electrostatic chucks · CPC title