Method for producing a mirror assembly, and coating system
US-2025354253-A1 · Nov 20, 2025 · US
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Schicketanz Thomas patents
Schicketanz Thomas is listed as an inventor on 42 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Schicketanz Thomas |
| Total patents | 42 |
| First publication | Feb 26, 2015 |
| Latest publication | Nov 20, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and device for characterizing the surface shape of an optical element
US-11927500-B2 · Mar 12, 2024 · US
Process for producing a reflective optical element for the extreme ultraviolet wavelength range and reflective optical element
US-2023417961-A1 · Dec 28, 2023 · US
Method and device for characterizing the surface shape of an optical element
US-2022236139-A1 · Jul 28, 2022 · US
Method and device for characterizing the surface shape of an optical element
US-11326872-B2 · May 10, 2022 · US
Method and device for characterizing the surface shape of an optical element
US-2021140762-A1 · May 13, 2021 · US
Projection optical unit for EUV projection lithography
US-10545323-B2 · Jan 28, 2020 · US
Optical system, in particular for a microlithographic projection exposure apparatus
US-10520827-B2 · Dec 31, 2019 · US
Optical element and optical arrangement therewith
US-10474036-B2 · Nov 12, 2019 · US
Optical system, in particular for a microlithographic projection exposure apparatus
US-2019212659-A1 · Jul 11, 2019 · US
Recent patents
Latest publications not already listed above.
Projection optical unit for euv projection lithography
US-2019121107-A1 · Apr 25, 2019 · US
Catadioptric projection objective comprising deflection mirrors and projection exposure method
US-2019056576-A1 · Feb 21, 2019 · US
EUV mirror and optical system comprising EUV mirror
US-10203435-B2 · Feb 12, 2019 · US
Catadioptric projection objective
US-2018373006-A1 · Dec 27, 2018 · US
Catadioptric projection objective comprising deflection mirrors and projection exposure method
US-10120176-B2 · Nov 6, 2018 · US
Catadioptric projection objective
US-10042146-B2 · Aug 7, 2018 · US
Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element
US-10001631-B2 · Jun 19, 2018 · US
Catadioptric projection objective comprising deflection mirrors and projection exposure method
US-2018095259-A1 · Apr 5, 2018 · US
Catadioptric projection objective
US-2018095258-A1 · Apr 5, 2018 · US
Reflective optical element, and optical system of a microlithographic projection exposure apparatus
US-9915873-B2 · Mar 13, 2018 · US
EUV mirror and optical system comprising EUV mirror
US-9915876-B2 · Mar 13, 2018 · US
Catadioptric projection objective comprising deflection mirrors and projection exposure method
US-9817220-B2 · Nov 14, 2017 · US
Projection Lens for EUV Microlithography, Film Element and Method for Producing a Projection Lens Comprising a Film Element
US-2017261730-A9 · Sep 14, 2017 · US
Catadioptric projection objective
US-9726870-B2 · Aug 8, 2017 · US
Imaging catoptric EUV projection optical unit
US-9639005-B2 · May 2, 2017 · US
Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus
US-9581910-B2 · Feb 28, 2017 · US
Catadioptric projection objective comprising deflection mirrors and projection exposure method
US-2017052355-A1 · Feb 23, 2017 · US
Optical element and optical arrangement therewith
US-2016377988-A1 · Dec 29, 2016 · US
Euv mirror and optical system comprising euv mirror
US-2016327702-A1 · Nov 10, 2016 · US
Method for correcting the surface form of a mirror
US-2016299268-A1 · Oct 13, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 42 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70316 | 19 |
| G02B17/0892 | 18 |
| G02B17/0896 | 18 |
| G03F7/70225 | 18 |
| G02B17/08 | 16 |