Method and device for characterizing the surface shape of an optical element

Patent metadata

Field	Value
Publication number	US-11326872-B2
Application number	US-202117151017-A
Country	US
Kind code	B2
Filing date	Jan 15, 2021
Priority date	Jul 17, 2018
Publication date	May 10, 2022
Grant date	May 10, 2022

Abstract

A method and a device for characterizing the surface shape of an optical element. In the method, in at least one interferogram measurement carried out by an interferometric test arrangement, a test wave reflected at the optical element is caused to be superimposed with a reference wave not reflected at the optical element. In this case, the figure of the optical element is determined on the basis of at least two interferogram measurements using electromagnetic radiation having in each case linear input polarization or in each case circular input polarization, wherein the input polarizations for the two interferogram measurements differ from one another.

First claim

What is claimed is:

1. A method for characterizing a surface shape of an optical element, comprising:
in at least one interferogram measurement carried out by an interferometric test arrangement, causing a test wave reflected at the optical element to be superimposed with a reference wave not reflected at the optical element,
determining a figure of the optical element based on at least two interferogram measurements using electromagnetic radiation having in each case linear input polarization or in each case circular input polarization,

wherein the input polarizations for the two interferogram measurements differ from one another, and
wherein the input polarizations for the two interferogram measurements correspond in terms of their polarization direction to the directions of eigenvectors of a Jones matrix that describes a polarization effect of the interferometric test arrangement in a region thereof traversed jointly by the reference wave and the test wave.

2. The method as claimed in claim 1 , wherein the input polarizations for the two interferogram measurements are linear input polarizations having different polarization directions.

3. The method as claimed in claim 1 , wherein the input polarizations for the two interferogram measurements are orthogonal to one another.

4. The method as claimed in claim 1 , wherein the figure of the optical element is determined based on an averaging of interferogram phases respectively obtained during the two interferogram measurements.

5. The method as claimed in claim 1 , wherein the two interferogram measurements are carried out on the optical element to be characterized with regard to a surface shape of the optical element.

6. The method as claimed in claim 1 , wherein the two interferogram measurements are carried out in a prior calibration on a calibration probe that is different than the optical element to be characterized with regard to a surface shape of the optical element.

7. The method as claimed in claim 6 , wherein the figure of the optical element is determined based on a difference between polarization-induced interferogram phases obtained for the two interferogram measurements used input polarizations, said difference being ascertained based on the prior calibration.

8. The method as claimed in claim 6 , wherein the prior calibration comprises at least one interferogram measurement using electromagnetic radiation having circular input polarization.

9. The method as claimed in claim 1 , wherein the optical element is a mirror.

10. The method as claimed in claim 1 , wherein the optical element is configured for an operating wavelength of less than 30 nm.

11. The method as claimed in claim 1 , wherein the optical element is an optical element of a microlithographic projection exposure apparatus.

12. A method for characterizing a surface shape of an optical element, comprising:
in at least one interferogram measurement carried out by an interferometric test arrangement, causing a test wave reflected at the optical element to be superimposed with a reference wave not reflected at the optical element,
determining a figure of the optical element based on an averaging of interferogram phases respectively obtained during two interferogram measurements,

wherein the input polarizations for said two interferogram measurements are orthogonal to one another, and
wherein the input polarizations for the two interferogram measurements correspond in terms of their polarization direction to the directions of eigenvectors of a Jones matrix that describes a polarization effect of the interferometric test arrangement in a region thereof traversed jointly by the reference wave and the test wave.

13. The method as claimed in claim 12 , wherein the two interferogram measurements are carried out on the optical element to be characterized with regard to a surface shape of the optical element.

14. The method as claimed in claim 12 , wherein the two interferogram measurements are carried out in a prior calibration on a calibration probe that is different than the optical element to be characterized with regard to a surface shape of the optical element.

15. The method as claimed in claim 14 , wherein the figure of the optical element is determined based on a difference between polarization-induced interferogram phases obtained for the two interferogram measurements used input polarizations, said difference being ascertained based on the prior calibration.

16. The method as claimed in claim 14 , wherein the prior calibration comprises at least one interferogram measurement using electromagnetic radiation having circular input polarization.

17. The method as claimed in claim 12 , wherein the optical element is a mirror.

18. The method as claimed in claim 12 , wherein the optical element is configured for an operating wavelength of less than 30 nm.

19. The method as claimed in claim 12 , wherein the optical element is an optical element of a microlithographic projection exposure apparatus.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Siegler Steffen
• Schicketanz Thomas

Classifications

• G03F7/70591 Primary

  Testing optical components · CPC title

• G01B9/02011

  using temporal polarization variation · CPC title

• G01M11/005

  Testing of reflective surfaces, e.g. mirrors · CPC title

• G01B2290/70

  Using polarization in the interferometer · CPC title

• G01B11/2441 Primary

  using interferometry · CPC title