Catadioptric projection objective

Patent metadata

Field	Value
Publication number	US-10042146-B2
Application number	US-201715654766-A
Country	US
Kind code	B2
Filing date	Jul 20, 2017
Priority date	Aug 13, 2009
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

A method of providing a catadioptric projection includes: providing a first partial objective for imaging an object field onto a first real intermediate image; providing a second partial objective for imaging the first real intermediate image onto a second real intermediate image, in which the second partial objective includes a concave mirror; providing a third partial objective for imaging the second intermediate image onto an image field, the third partial objective including an aperture stop; providing a first folding mirror and a second folding mirror; and providing an antireflection coating onto a surface of at least one lens that is directly adjacent to the concave mirror or that is separate from the concave mirror by a single lens, in which the antireflection coating is designed to have reflectivity of less than 0.2% for a wavelength between 150 nm and 250 nm and for an angle-of-incidence range between 0° and 30°.

First claim

What is claimed is:

1. A method of providing a catadioptric projection objective for microlithography, the method comprising:
providing a first partial objective for imaging an object field in an object plane onto a first real intermediate image;
providing a second partial objective for imaging the first real intermediate image onto a second real intermediate image, wherein the second partial objective comprises a concave mirror;
providing a third partial objective for imaging the second real intermediate image onto an image field in an image plane, the third partial objective comprising an aperture stop;
providing a first folding mirror for deflecting radiation from the object plane toward the concave mirror and a second folding mirror for deflecting radiation from the concave mirror toward the image plane; and
providing an antireflection coating onto at least one surface of at least one lens, the at least one lens being directly adjacent to the concave mirror or being separate from the concave mirror by a single lens, wherein the antireflection coating is designed to have a reflectivity of less than 0.2% for a wavelength of between 150 nm and 250 nm and for an angle-of-incidence range of between 0° and 30°.

2. The method of providing the catadioptric projection objective of claim 1 , wherein the antireflection coating is designed to have a reflectivity of less than 0.1% for the wavelength between 150 nm and 250 nm and for the angle-of-incidence range of between 0° and 30°.

3. The method of providing the catadioptric projection objective of claim 1 , wherein the antireflection coating is designed to have a reflectivity of less than 0.1% for the wavelength between 150 nm and 250 nm and for an angle-of-incidence range of between 0° and 20°.

4. The method of providing the catadioptric projection objective of claim 1 , wherein the antireflection coating is designed to have a reflectivity of less than 0.02% for the wavelength between 150 nm and 250 nm and for an angle-of-incidence range of between 0° and 10°.

5. The method of providing the catadioptric projection objective of claim 1 , wherein providing the antireflection coating comprises forming the antireflection coating to have at least six layers composed alternately of material having a high refractive index and material having a low refractive index.

6. The method of providing the catadioptric projection objective of claim 5 , wherein the antireflection coating has seven layers composed alternately of material having a high refractive index and material having a low refractive index.

7. The method of providing the catadioptric projection objective of claim 5 , wherein the material having a low refractive index is a dielectric material selected from the group consisting of: magnesium fluoride, aluminum fluoride, sodium fluoride, lithium fluoride, calcium fluoride, barium fluoride, strontium fluoride, cryolite, chiolite, and combinations thereof.

8. The method of providing the catadioptric projection objective of claim 5 , wherein the material having a high refractive index is a dielectric material selected from the group consisting of neodymium fluoride, lanthanum fluoride, gadolinium fluoride, dysprosium fluoride, aluminum oxide, lead fluoride, yttrium fluoride, and combinations thereof.

9. The method of providing the catadioptric projection objective of claim 1 , wherein the at least one surface of the at least one lens has a deviation from a marginal ray concentricity of less than 20°.

10. The method of providing the catadioptric projection objective of claim 1 , wherein the second partial objective is a catadioptric partial objective.

11. The method of providing the catadioptric projection objective of claim 1 , wherein the second partial objective comprises exactly one concave mirror.

12. The method of providing the catadioptric projection objective of claim 1 , wherein the catadioptric projection objective has an image-side numerical aperture NA of at least 1.2 when an immersion fluid is positioned between the third partial objective and the image plane.

13. The method of providing the catadioptric projection objective of claim 1 , wherein the at least one lens is a part of the second partial objective.

14. The method of providing the catadioptric projection objective of claim 1 , wherein the catadioptric projection objective is an immersion projection objective in which during operation an immersion liquid is situated between a last lens surface and the image plane.

15. The method of providing the catadioptric projection objective of claim 1 , wherein there are four or less lenses between the aperture stop and the image plane.

16. The method of providing the catadioptric projection objective of claim 1 , wherein the third partial objective comprises at least two negative lenses.

17. The method of providing the catadioptric projection objective of claim 16 , wherein the at least two negative lenses are positioned between the second real intermediate image and the aperture stop.

18. The method of providing the catadioptric projection objective of claim 16 , wherein the third partial objective comprises three negative lenses.

19. The method of providing the catadioptric projection objective of claim 16 , wherein the at least two negative lenses have concave surfaces facing the image plane.

20. The method of providing the catadioptric projection objective of claim 1 , wherein the concave mirror is arranged in a region of a pupil plane.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Epple Alexander
• Kamenov Vladimir
• Gruner Toralf
• Schicketanz Thomas

Classifications

• G02B17/0892 Primary

  specially adapted for the UV · CPC title

• G03F7/70225

  Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements · CPC title

• G02B17/08 Primary

  Catadioptric systems {(used in non-imaging applications G02B19/00)} · CPC title

• G03F7/70275

  Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems · CPC title

• G03F7/70

  Microphotolithographic exposure; Apparatus therefor (photo-masks G03F1/00) · CPC title