ALD apparatus, method and valve
US-12460297-B2 · Nov 4, 2025 · US
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Pudas Marko patents
Pudas Marko is listed as an inventor on 45 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Pudas Marko |
| Total patents | 45 |
| First publication | May 19, 2016 |
| Latest publication | Nov 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Porous inlet
US-12351915-B2 · Jul 8, 2025 · US
Substrate processing methods and apparatus
US-12297535-B2 · May 13, 2025 · US
Precursor container apparatus
US-2024360555-A1 · Oct 31, 2024 · US
Adjustable fluid inlet assembly for a substrate processing apparatus and method
US-12110588-B2 · Oct 8, 2024 · US
Coating of fluid-permeable materials
US-12065730-B2 · Aug 20, 2024 · US
Spring loaded medical device
US-11992425-B2 · May 28, 2024 · US
Sensor and its manufacturing method
US-11976989-B2 · May 7, 2024 · US
Ald apparatus, method and valve
US-2023383404-A1 · Nov 30, 2023 · US
ALD apparatus, method and valve
US-11761082-B2 · Sep 19, 2023 · US
Recent patents
Latest publications not already listed above.
Method and apparatus for cleaning medical instruments and for detecting residue thereon
US-11759100-B2 · Sep 19, 2023 · US
Coated items and manufacturing thereof
US-2023257870-A1 · Aug 17, 2023 · US
Substrate processing apparatus and method
US-2023227974-A1 · Jul 20, 2023 · US
Substrate coating
US-11668004-B2 · Jun 6, 2023 · US
Manufacturing of coated items
US-11668005-B2 · Jun 6, 2023 · US
Adjustable fluid inlet assembly for a substrate processing apparatus and method
US-2023090809-A1 · Mar 23, 2023 · US
Substrate processing apparatus and method
US-2023024132-A1 · Jan 26, 2023 · US
Adjustable fluid inlet assembly for a substrate processing apparatus and method
US-11505864-B2 · Nov 22, 2022 · US
Method for formation of patterned solder mask
US-11477894-B2 · Oct 18, 2022 · US
Coating of 3-dimensional substrates
US-11447867-B2 · Sep 20, 2022 · US
Porous inlet
US-2022235466-A1 · Jul 28, 2022 · US
Substrate processing methods and apparatus
US-2022235465-A1 · Jul 28, 2022 · US
Particle coating
US-11261526-B2 · Mar 1, 2022 · US
Implant coating
US-11241316-B2 · Feb 8, 2022 · US
Coating by ald for suppressing metallic whiskers
US-2021310124-A1 · Oct 7, 2021 · US
Substrate processing apparatus and method
US-2021189560-A1 · Jun 24, 2021 · US
Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods
US-10982325-B2 · Apr 20, 2021 · US
Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods
US-2021087682-A1 · Mar 25, 2021 · US
Uniform deposition
US-2021087687-A1 · Mar 25, 2021 · US
Manufacturing of coated items
US-2020385857-A1 · Dec 10, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Picosun Oy | 45 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45544 | 32 |
| C23C16/45555 | 20 |
| C23C16/45519 | 13 |
| C23C16/45561 | 13 |
| C23C16/4408 | 12 |