Sensor and its manufacturing method

Patent metadata

Field	Value
Publication number	US-11976989-B2
Application number	US-202016832161-A
Country	US
Kind code	B2
Filing date	Mar 27, 2020
Priority date	Mar 29, 2019
Publication date	May 7, 2024
Grant date	May 7, 2024

Abstract

A strain sensor that includes a first atomic layer deposition layer, a flexible molecular layer deposition layer on top of the first atomic layer deposition layer, and a second atomic layer deposition layer on top of the molecular layer deposition layer.

First claim

The invention claimed is:

1. A strain sensor device, comprising:
a first electrically conductive atomic layer deposition, ALD, layer attached or deposited on a substrate;
a flexible or compressible electrically insulating molecular layer deposition, MLD, layer on top of the first ALD layer; and
a second electrically conductive ALD layer on top of the MLD layer, the strain sensor forming a circuit providing information indicative of strain.

2. The device of claim 1 being an implantable device.

3. The device of claim 1 , comprising:
an antenna to provide said information indicative of strain.

4. The device of claim 1 , wherein said substrate is biodegradable.

5. The device of claim 1 being biodegradable.

6. The device of claim 1 , wherein the substrate is a biodegradable screw or nail.

7. The device of claim 1 , comprising an RC or RLC circuit to provide said information indicative of strain.

8. The device of claim 1 , wherein the device is configured to provide said information indicative of strain externally readable by radio frequency.

9. A sensor, comprising:
a molecular layer deposition, MLD, layer in between two electrically conductive atomic layer deposition, ALD, layers, at least one of the electrically conductive ALD layers having at least one hole for material to push through to absorb to the MLD layer.

10. A method for manufacturing a strain sensor device, comprising:
taking an implantable substrate;
depositing on the implantable substrate a capacitor structure comprising an electrically conductive ALD layer on opposite sides of a flexible or compressible electrically insulating MLD layer; and
providing a circuit comprising the capacitor structure configured to provide information indicative of strain.

11. The method of claim 10 , wherein the MLD layer together with the device is biodegradable.

Assignees

• Picosun Oy

Inventors

• Pudas Marko
• Kivioja Jani
• Oksala Niku

Classifications

• G01L1/2287 Primary

  constructional details of the strain gauges (adjustable resistors H01C10/00) · CPC title

• A61B5/002

  Monitoring the patient using a local or closed circuit, e.g. in a room or building (A61B5/0017 takes precedence) · CPC title

• A61B5/4851

  Prosthesis assessment or monitoring · CPC title

• A61B17/846

  Nails or pins, i.e. anchors without movable parts, holding by friction only, with or without structured surface (A61B17/72, A61B17/86 take precedence) · CPC title

• A61B17/86

  Pins or screws {or threaded wires; nuts therefor (A61B17/72 take precedence)} · CPC title