Coating of fluid-permeable materials

Patent metadata

Field	Value
Publication number	US-12065730-B2
Application number	US-202016894160-A
Country	US
Kind code	B2
Filing date	Jun 5, 2020
Priority date	Jun 6, 2019
Publication date	Aug 20, 2024
Grant date	Aug 20, 2024

Abstract

Chemical deposition reactor assembly configured for formation of coatings on surfaces of fluid-permeable materials, such as porous materials, by chemical deposition is provided, the reactor assembly includes a reaction chamber configured to receive, at least in part, a fluid-permeable substrate with a target surface to be coated; at least one reactive fluid intake line configured to mediate a flow of reactive fluid into the reaction chamber, and an inert fluid delivery arrangement with at least one enclosed section configured to mediate a flow of inert fluid through the substrate towards its' target surface such, that at the surface the flow of inert fluid encounters the flow of reactive fluid, whereby a coating is formed at the target surface of the fluid-permeable substrate.

First claim

The invention claimed is:

1. A reactor assembly configured for formation of coatings on surfaces of fluid-permeable substrates by chemical deposition, the reactor assembly comprising:
a reaction chamber configured to receive, at least in part, a fluid-permeable substrate having a first, target surface to be coated and a second, non-targeted surface, the reaction chamber being configured to receive the first, target surface therein, the reaction chamber comprising an outer sidewall having an aperture configured to accommodate the fluid-permeable substrate, the outer sidewall being larger than the aperture;
a circumference-adjusting system disposed at the outer sidewall of the reaction chamber, the circumference-adjusting system being configured to adjust the size of the aperture of the outer sidewall to retain the fluid-permeable substrate;
at least one reactive fluid intake line configured to mediate a flow of a reactive fluid into the reaction chamber;
an inert fluid delivery arrangement with at least one enclosed section outside of the reaction chamber, the at least one enclosed section adjoining the reaction chamber via the outer sidewall of the reaction chamber, the at least one enclosed section defining a cavity configured to receive, at least in part, the fluid-permeable substrate with the second, non-targeted surface disposed within the cavity of the at least one enclosed section when the fluid-permeable substrate is disposed in the reactor assembly with the first, target surface disposed within the reaction chamber and the second, non-targeted surface within the at least one enclosed section, the at least one enclosed section being configured to mediate a flow of inert fluid exposed to the second, non-targeted surface, passing through the fluid-permeable substrate to the first, target surface such that the flow of inert fluid first encounters the flow of the reactive fluid at the first, target surface;
at least one first switch valve configured to alter the flow of inert fluid at predetermined points of time to discontinue the flow of inert fluid at a time point when the reactive fluid reaches the first, target surface of said substrate, whereby a depth of penetration of reactive fluid into the fluid-permeable substrate at the first, target surface is regulated and a coating is formed, to a predetermined depth resolution, at the entire first, target surface of said substrate,
wherein the inert fluid delivery arrangement is configured such that the flow of inert fluid is directed from the at least one enclosed section, passing through the fluid-permeable substrate to the first, target surface of the fluid-permeable substrate toward the reaction chamber such that the flow of inert fluid first encounters the flow of the reactive fluid at the first, target surface when the coating is formed on the first, target surface of the fluid-permeable substrate,
wherein fluid flow between the enclosed section and the reaction chamber occurs solely via the fluid-permeable substrate.

2. The reactor assembly of claim 1 , wherein the at least one enclosed section is disposed separate from the reaction chamber.

3. The reactor assembly of claim 1 , wherein the inert fluid delivery arrangement further comprises at least one inert fluid intake line.

4. The reactor assembly of claim 3 , further comprising at least one heating element adjoining or integrated into one or more of (i) the at least one enclosed section, and (ii) the at least one inert fluid intake line.

5. The reactor assembly of claim 3 , further comprising at least one second switch valve configured to control the flow of reactive fluid in the at least one reactive fluid intake line.

6. The reactor assembly of claim 1 , wherein the at least one enclosed section is provided essentially outside the reaction chamber.

7. The reactor assembly of claim 1 , wherein the at least one enclosed section is provided in a lid.

8. The reactor assembly of claim 1 , wherein the reactor assembly is configured as an atomic layer deposition (ALD) reactor.

9. Use of the reactor assembly according to claim 1 to coat gas sensors.

10. Use of the reactor assembly according to claim 1 to manufacture solid-state porous catalysts.

11. The reactor assembly of claim 1 , wherein the reactor assembly is configured to receive the fluid-permeable substrate between the reaction chamber and the at least one enclosed section such that the at least one enclosed section is isolated from the reaction chamber and the flow of inert fluid between the at least one enclosed section and the reaction chamber occurs solely via the fluid-permeable substrate.

12. A reactor assembly system configured for formation of coatings on surfaces of fluid-permeable substrates by chemical deposition, the reactor assembly system comprising:
a fluid-permeable substrate including a first, target surface to be coated and a second, non-targeted surface; and
a reactor assembly comprising
a reaction chamber configured to receive the first, target surface of the fluid-permeable substrate therein, the reaction chamber comprising an outer sidewall having an aperture configured to accommodate the fluid-permeable substrate, the sidewall being larger than the aperture,
a circumference-adjusting system disposed at the outer sidewall of the reaction chamber, the circumference-adjusting system being configured to adjust the size of the aperture of the outer sidewall to retain the fluid-permeable substrate,
at least one reactive fluid intake line configured to mediate a flow of a reactive fluid into the reaction chamber,
an inert fluid delivery arrangement with at least one enclosed section outside of the reaction chamber, the at least one enclosed section adjoining the reaction chamber via the outer sidewall of the reaction chamber, the at least one enclosed section defining a cavity, the fluid-permeable substrate being at least partially received in the cavity of the at least one enclosed section with the second, non-targeted surface disposed within the at least one enclosed section, the at least one enclosed section being configured to mediate a flow of inert fluid exposed to the second, non-targeted surface, passing through the fluid-permeable substrate to the first, target surface such that the flow of inert fluid first encounters the flow of the reactive fluid at the first, target surface,
at least one first switch valve configured to alter the flow of inert fluid at predetermined points of time to discontinue the flow of inert fluid at a time point when the reactive fluid reaches the first, target surface of said substrate, whereby a depth of penetration of reactive fluid into the fluid-permeable substrate at the first, target surface is regulated and a coating is formed, to a predetermined depth resolution, at the entire first, target surface of said substrate,

wherein the inert fluid delivery arrangement is configured such that the flow of inert fluid is directed from the at least one enclosed section, passing through the fluid-permeable substrate to the first, target surface of the fluid-permeable substrate toward the reaction chamber such that the flow of inert fluid first encounters the flow of the reactive fluid at the first, target surface when the coating is formed on the first, target surface of the fluid-permeable substrate, and
wherein fluid flow between the enclosed section and the reaction chamber occurs solely via the fluid-permeable substrate.

Assignees

• Picosun Oy

Inventors

• Pudas Marko

Classifications

• C23C16/45521

  the gas, other than thermal contact gas, being introduced the rear of the substrate to flow around its periphery · CPC title

• C23C16/45519

  Inert gas curtains · CPC title

• B05C13/00

  Means for manipulating or holding work, e.g. for separate articles {(B05C1/0821 takes precedence)} · CPC title

• B05C9/04

  for applying liquid or other fluent material to opposite sides of the work · CPC title

• B05C7/04

  the liquid or other fluent material flowing or being moved through the work; the work being filled with liquid or other fluent material and emptied · CPC title