Adjustable fluid inlet assembly for a substrate processing apparatus and method

Patent metadata

Field	Value
Publication number	US-12110588-B2
Application number	US-202217991611-A
Country	US
Kind code	B2
Filing date	Nov 21, 2022
Priority date	Jun 21, 2017
Publication date	Oct 8, 2024
Grant date	Oct 8, 2024

Abstract

A fluid inlet assembly for a substrate processing apparatus includes a fluid inlet pipe configured to pass through a wall of a sealed pressure vessel, a resilient element around the fluid inlet pipe outside the sealed pressure vessel coupling the fluid inlet pipe to the wall, and first and second end parts, the resilient element being coupled therebetween.

First claim

The invention claimed is:

1. A fluid inlet assembly for a substrate processing apparatus, comprising:
a fluid inlet pipe configured to pass through a wall of a sealed pressure vessel;
a resilient element around the fluid inlet pipe outside the sealed pressure vessel, coupling the fluid inlet pipe to the wall; and
first and second end parts of the fluid inlet assembly, the resilient element being coupled therebetween,
where the fluid inlet pipe is formed of two pipes arranged to slide inside each other.

2. The fluid inlet assembly of claim 1 , wherein one of an interior surface and an exterior surface of the resilient element sees pressure prevailing within the sealed pressure vessel and the other sees pressure outside the sealed pressure vessel, and where the fluid inlet pipe prevents fluid carried inside from being in contact with the resilient element.

3. The fluid inlet assembly of claim 1 , where the resilient element is configured to deform under displacements between the first and second end parts of the fluid inlet or assembly.

4. The fluid inlet assembly of claim 1 , where the resilient element is configured to cause mechanical pressure to the fluid inlet pipe.

5. The fluid inlet assembly of claim 4 where the direction of mechanical pressure is inwards, towards interior of the sealed pressure vessel.

6. The fluid inlet assembly of claim 1 , comprising:
at least one limiter, coupled between the first and second end parts, having a length in a direction of a longitudinal axis of the fluid inlet pipe.

7. The fluid inlet assembly of claim 6 , wherein the resilient element around the fluid inlet pipe is positioned between the fluid inlet pipe and the at least one limiter.

8. The fluid inlet assembly of claim 6 , wherein the at least one limiter is configured to limit the movement of the resilient element and thereby the fluid inlet assembly.

9. The fluid inlet assembly of claim 6 , where the resilient element is configured to deform at least in the same direction as the at least one limiter.

10. The fluid inlet assembly of claim 1 , comprising at least one heat distributing element around the fluid inlet pipe, to distribute heat along the fluid inlet pipe.

11. The fluid inlet assembly of claim 10 , wherein the at least one heat distributing element extends over a length of the fluid inlet pipe outside the sealed pressure vessel and over a feed-through point in the wall of the sealed pressure vessel, or the at least one heat distributing element extends over the entire length of the fluid inlet pipe.

12. The fluid inlet assembly of claim 10 , wherein the at least one heat distributing element is configured to balance temperature differences and to create preferable heat gradients for a fluid in the fluid inlet pipe.

13. The fluid inlet assembly of claim 10 , wherein the fluid inlet pipe is configured to pass through the wall of a sealed pressure vessel forming an outer chamber that surrounds an inner chamber which is a sealed reaction chamber, and wherein the fluid inlet pipe is configured to have a contact point with the sealed reaction chamber.

14. The fluid inlet assembly of claim 1 , where the fluid inlet pipe is arranged to be disassembled by removal of at least a portion of the fluid inlet pipe.

15. The fluid inlet assembly of claim 1 , where the fluid inlet pipe is arranged to be in a fixed position with respect to the wall of the sealed pressure vessel.

Assignees

• Picosun Oy

Inventors

• Malinen Timo
• Kilpi Väinö
• Pudas Marko

Classifications

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• C23C16/45563

  Gas nozzles · CPC title

• C30B25/14 Primary

  Feed and outlet means for the gases; Modifying the flow of the reactive gases · CPC title

• C23C16/45561 Primary

  Gas plumbing upstream of the reaction chamber · CPC title