Adjustable fluid inlet assembly for a substrate processing apparatus and method

Patent metadata

Field	Value
Publication number	US-11505864-B2
Application number	US-201716622070-A
Country	US
Kind code	B2
Filing date	Jun 21, 2017
Priority date	Jun 21, 2017
Publication date	Nov 22, 2022
Grant date	Nov 22, 2022

Abstract

A substrate processing apparatus, includes a sealed pressure vessel, such as an Atomic Layer Deposition, ALD, apparatus, a fluid inlet assembly attached to a wall of the sealed pressure vessel, the fluid inlet assembly having a fluid inlet pipe passing through the wall, and a resilient element in the fluid inlet assembly around the fluid inlet pipe coupling the inlet pipe to the wall, where one of an interior surface and an exterior surface of the resilient element sees pressure prevailing within the pressure vessel and the other sees ambient pressure, and where the fluid inlet pipe prevents fluid carried inside from being in contact with the resilient element, and a relating method.

First claim

The invention claimed is:

1. A substrate processing apparatus, comprising:
a sealed pressure vessel forming an outer chamber that surrounds an inner chamber which is a sealed reaction chamber;
a fluid inlet assembly attached to a wall of the sealed pressure vessel, the fluid inlet assembly having a fluid inlet pipe passing through the wall, where the sealed reaction chamber comprises a collar locking the fluid inlet pipe in a horizontal position, the apparatus further comprising:
a resilient element in the fluid inlet assembly around the fluid inlet pipe coupling the fluid inlet pipe to the wall, where one of an interior surface and an exterior surface of the resilient element sees pressure prevailing within the pressure vessel and the other sees ambient pressure, and where the fluid inlet pipe prevents fluid carried inside from being in contact with the resilient element.

2. The apparatus of claim 1 , where the resilient element is configured to deform under displacements between fixed first and second end parts of the fluid inlet assembly.

3. The apparatus of claim 1 , where the resilient element is configured to cause mechanical pressure to the fluid inlet pipe.

4. The apparatus of claim 3 , where the direction of mechanical pressure is inwards, towards the sealed reaction chamber.

5. The apparatus of claim 1 , where the fluid inlet pipe is formed of two pipes arranged to slide inside each other.

6. The apparatus of claim 1 , where the fluid inlet pipe is arranged to be disassembled by removing at least a portion of the fluid inlet pipe inwards via an interior of the apparatus.

7. The apparatus of claim 1 , where the fluid inlet pipe is arranged to be disassembled by removing at least a portion of the fluid inlet pipe outwards to a direction pointing away from the apparatus.

8. The apparatus of claim 1 , where the fluid inlet pipe is arranged to be in a fixed position with respect to a wall of the sealed reaction chamber.

9. The apparatus of claim 1 , where the fluid inlet pipe is arranged to be in a rotatable position with respect to a wall of the sealed reaction chamber.

10. The apparatus of claim 1 , where the fluid inlet pipe is equipped with a heat distributing element to distribute heat along the fluid inlet pipe.

11. The apparatus of claim 10 , where the heat distributing element extends over a feedthrough point of the wall of the sealed pressure vessel.

12. The apparatus of claim 1 , where a contact point at which the fluid inlet pipe meets the sealed reaction chamber is a non-permanent fixing point.

13. The apparatus of claim 12 , where the contact point is sealed and/or enforced.

14. A method in a substrate processing apparatus, comprising:
providing a sealed pressure vessel forming an outer chamber that surrounds an inner chamber which is a sealed reaction chamber, the sealed pressure vessel having a fluid inlet assembly attached to a wall of the sealed pressure vessel, the fluid inlet assembly having a fluid inlet pipe passing through the wall, where the sealed reaction chamber comprises a collar locking the fluid inlet pipe in a horizontal position, and
providing a resilient element in the fluid inlet assembly around the fluid inlet pipe coupling the fluid inlet pipe to the wall, where one of an interior surface and an exterior surface of the resilient element sees pressure prevailing within the pressure vessel and the other sees ambient pressure, and where the fluid inlet pipe prevents fluid carried inside from being in contact with the resilient element, the method further comprising:
causing mechanical pressure to the fluid inlet pipe via contraction of the resilient element, the direction of the mechanical pressure being towards the pressure vessel interior.

15. The method of claim 14 , where the mechanical pressure is caused by a pressure difference between the pressure prevailing within the pressure vessel and the ambient pressure.

Assignees

• Picosun Oy

Inventors

• Malinen Timo
• Kilpi Väinö
• Pudas Marko

Classifications

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• C30B25/14 Primary

  Feed and outlet means for the gases; Modifying the flow of the reactive gases · CPC title

• C23C16/45544 Primary

  characterized by the apparatus · CPC title

• C23C16/4557

  Heated nozzles · CPC title