Spatial gas injection for gas depletion and gas concentration adjustability, and related processing chambers, apparatus, and methods
US-2026068578-A1 · Mar 5, 2026 · US
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Patil Aniketnitin patents
Patil Aniketnitin is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Patil Aniketnitin |
| Total patents | 14 |
| First publication | Jan 18, 2024 |
| Latest publication | Mar 5, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Gas injection and pre-heating for selective gas activation, and related processing chambers, apparatus, and methods
US-2026062807-A1 · Mar 5, 2026 · US
Edge ring configurations for processing chambers and related chamber kits and methods
US-2025379096-A1 · Dec 11, 2025 · US
Reflector configurations for energy focusing in processing chambers, and related chamber kits and methods
US-2025358906-A1 · Nov 20, 2025 · US
Computer vision for susceptor leveling and alignment
US-2025349589-A1 · Nov 13, 2025 · US
Lift assemblies, and related methods and components, for substrate processing chambers
US-12428753-B2 · Sep 30, 2025 · US
Chamber kits, processing chambers, and methods for gas activation in semiconductor manufacturing
US-2025118576-A1 · Apr 10, 2025 · US
Improved reflector for process chamber
US-2025027716-A1 · Jan 23, 2025 · US
Homing methods for lift assemblies, and related apparatus and components, for substrate processing chambers
US-2024326187-A1 · Oct 3, 2024 · US
Purge system to clean wafer backside for ring susceptor
US-2024258097-A1 · Aug 1, 2024 · US
Recent patents
Latest publications not already listed above.
Injectors, liners, process kits, processing chambers, and related methods for gas flow in batch processing of semiconductor manufacturing
US-2024254627-A1 · Aug 1, 2024 · US
Lift assemblies, and related methods and components, for substrate processing chambers
US-2024198468-A1 · Jun 20, 2024 · US
Cassette structures and related methods for batch processing in epitaxial deposition operations
US-2024141495-A1 · May 2, 2024 · US
Batch processing apparatus, systems, and related methods and structures for epitaxial deposition operations
US-2024021444-A1 · Jan 18, 2024 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 14 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C30B25/12 | 8 |
| C30B25/14 | 6 |
| H10P72/7621 | 5 |
| H10P72/7612 | 5 |
| H10P72/0436 | 5 |